Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results

Гарахин, С. А.; Zabrodin, I. G.; Zuev, S. E.; Kas’kov, I. A.; Lopatin, A. Ya.; Nechay, A. N.; Полковников, В. Н.; Салащенко, Н. Н.; Tsybin, N. N.; Чхало, Н. И.; Свечников, М. В.

doi:10.1070/qel16300

Cited by 23 publications

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“…Reflectometry in the vicinity of the 11.4 nm wavelength was performed to measure the reflection coefficient of the mirrors. 36 The wavelength precision of this reflectometer is 0.002 nm and the reflectance results are repeatable within ±0.2%. Raman spectra were studied by an NTEGRA spectrometer of NT-MDT (Zelenograd, Russia), using a DPSS laser with an excitation wavelength of 473 nm.…”

Section: Methodsmentioning

confidence: 79%

“…This method was described by Svechnikov et al For XRR, the PANalytical X’Pert PRO diffractometer operating at the Cu Kα line with a wavelength of 0.154 nm and equipped with a four-crystal Ge (220) monochromator was used. Reflectometry in the vicinity of the 11.4 nm wavelength was performed to measure the reflection coefficient of the mirrors . The wavelength precision of this reflectometer is 0.002 nm and the reflectance results are repeatable within ±0.2%.…”

Section: Experimental Sectionmentioning

confidence: 99%

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Quantum Confinement Effect in a Nanoscale Mo/Si Multilayer Structure

et al. 2020

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In a condensed matter system, phonons and plasmons are well-known quasiparticles that represent unusual dispersion behavior of energy and momentum at nanoscales. In a nanoscale Mo/Si multilayer structure, phonon modes in Raman scattering indicated the coexistence of crystalline Si (c-Si) nanoclusters within an amorphous silicon (a-Si) matrix. The TO mode was red-shifted with a decrease in the nanocluster size of Si in nanolayer films. This was associated with the momentum of phonons and it is fundamentally correlated to phonon confinement. The correlation length of the Si network was significantly smaller in a-Si and the TO mode broadened asymmetrically and redshifted due to localized phonon density of state. Consequently, with a decrease in the thickness of the Si layer, blue shifts of plasmon energy for Mo 3d, Mo 4p, and Si 2p spectra were observed in X-ray photoelectron spectroscopy. Plasmon energy of the c-Si nanocluster was related to the forbidden gap, which increased with a decrease in cluster size. The concept of quantum confinement of phonon and electron states was used to determine the size of the c-Si nanoclusters in the a-Si matrix.

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Section: Methodsmentioning

confidence: 79%

Section: Experimental Sectionmentioning

confidence: 99%

Quantum Confinement Effect in a Nanoscale Mo/Si Multilayer Structure

et al. 2020

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“…Лазерно-плазменные источники (ЛПИ) мягкого рентгеновского (МР) и экстремального ультрафиолетового (ЭУФ) излучения с твердотельной мишенью широко используются в рефлектометрах [1][2][3][4][5][6][7], дифракционных спектрометрах [8][9][10] и в различных лазерноплазменных экспериментах [11,12]. Достоинствами таких источников являются высокая эффективность преобразования лазерного излучения в коротковолновое и большая средняя мощность, маленький (50−150 µm) размер [2,13] и квазинепрерывный характер спектра в большинстве случаев, когда не предпринимаются дополнительные меры по " разрежению" плазмы [13,14].…”

Section: Introductionunclassified