La0.67Ca0.33MnO3 thin films on Si (100) by DC magnetron sputtering technique using nanosized powder compacted target

Powders of copper and aluminium with a maximum grain size of 50 µm are mixed in different ratios. The mixtures are cold isostatically pressed into two‐inch circular targets which are mounted in a conventional magnetron set‐up and used to deposit both metallic Cu–Al as well as oxygen rich Cu–Al–O thin films. In both cases the thin film composition is analysed and related to the target composition. Crystallographic properties of the deposited films are presented as well. The influence of the target composition on the reactive behaviour is studied by hysteresis measurements. Furthermore, the effective sputter yields of elemental powder targets were measured. Depending on the material, the sputter yields of the powder target either increased or decreased compared to the sputter yields of solid targets. This can be qualitatively explained by an analysis of the target roughness. For the fast scanning of the compositional influence on material properties, the use of powder targets shows to be a suitable and valuable approach.

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Deposition of thin films by sputtering cold isostatically pressed powder targets: A case study

Boydens

Leroy

Persoons

et al. 2011

Physica Status Solidi (a)

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Structural and electrical characterization of La0.72Ca0.28MnO3 ceramic and thin films

Theingi

Zhang

et al. 2013

Applied Surface Science

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Microwave irradiation synthesis to obtain La0.7-xPrxCa0.3MnO3 perovskites: Electrical and electrochemical performance

Ferrel-Álvarez

Domínguez‐Crespo

Cong

et al. 2021

Journal of Alloys and Compounds

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La0.7-xPrxCa0.3MnO3 (LPCM) perovskites previously synthesized by the microwave-assisted method at 4 minutes and with different stoichiometry (x=0.35, 0.52 and 0.63) were evaluated through thermogravimetric analysis (TGA), electrical conductivity, thermal expansion coefficient (TEC), scanning electron microscopy (SEM), Brunauer-Emmet-Teller (BET) analysis and electrochemical impedance spectroscopy (EIS) using yttria stabilized zirconia (YSZ) as an electrolyte. The results are discussed in terms of the potential as cathode material to be applied in solid oxide fuel cells (SOFCs) applications at temperatures from 600 to 800 °C. Results derived from TGA showed that Pr promotes the uncoupling oxygen and oxygen vacancies favoring the fuel combusting. Also, TEC analysis revealed adequate stability between the YSZ electrolyte and the La0.7-xPrxCa0.3MnO3 to avoid cracking or failing, especially with high amount of Pr. The transition in morphology from irregular to regular shapes improves the BET and Barret-Joyner-Halenda (BJH) surfaces and promotes the triple phase boundary (TPB) connectivity. The electrical conductivity correlated to the availability in oxygen vacancies showed maximum conductivities in the order of 10 -2 S cm -1 . Activation energy (Ea) was found to be reduced with a minimum quantity of Pr (0.071 eV). EIS results indicate that the oxygen vacancies in the LPCM/YSZ system were better promoted with the highest amount of Pr= 0.63 (=0.9 V, 800 °C and 0.06 V of amplitude) in comparison with the minimum, Pr=0.35 (=1.2 V, 800 °C and 0.06 V of amplitude).

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La0.67Ca0.33MnO3 thin films on Si (100) by DC magnetron sputtering technique using nanosized powder compacted target

Cited by 6 publications

References 28 publications

Deposition of thin films by sputtering cold isostatically pressed powder targets: A case study

Deposition of thin films by sputtering cold isostatically pressed powder targets: A case study

Structural and electrical characterization of La0.72Ca0.28MnO3 ceramic and thin films

Microwave irradiation synthesis to obtain La0.7-xPrxCa0.3MnO3 perovskites: Electrical and electrochemical performance

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