Kinetostatic optimization of a MEMS-based compliant 3 DOF plane parallel platform

Belfiore, Nicola Pio; EmamiMeibodi, Mohammad; Verotti, Matteo; Crescenzi, Rocco; Balucani, M.; Nenzi, Paolo

doi:10.1109/icccyb.2013.6617600

Cited by 20 publications

(13 citation statements)

References 15 publications

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“…This evaluation has been done on the pseudorigid body equivalent mechanism, by means of a new and fast method for direct kinematic analysis of parallel manipulators. In 2013 a plane parallel micro-manipulator has been presented [38] for general purposes in-plane micro-positioning and a numerical procedure has been used in order to optimize some kinetostatic performance indices. The approach has been based on a refined simplification of the direct kinematic problem and it is applied to the pseudo-rigid body equivalent model of the original compliant mechanism.…”

Section: Introductionmentioning

confidence: 99%

Development of a MEMS technology CSFH based microgripper

Belfiore

Broggiato

Verotti

et al. 2014

2014 23rd International Conference on Robotics in Alpe-Adria-Danube Region (RAAD)

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This paper describes the design, simulation, construction process and experimental analysis of a microgripper, which makes use of a new concept hinge, called CSFH (Conjugate Surfaces Flexure Hinge). The new hinge combines a curved cantilever beam, as flexible element, and a pair of conjugate surfaces, whose contacts depend on load conditions. CSFH hinges improve accuracy and guarantee that minimum stress conditions hold within the flexible beam. This microgripper is designed for Deep Reactive-Ion Etching (D-RIE) construction process and comb-drive actuation. Theoretical basis and Finite Element Analysis (FEA) simulations have been employed in order to predict the feasibility of the device under construction. Finally, some experimental evidence of the construction process has been provided

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Section: Introductionmentioning

confidence: 99%

Development of a MEMS technology CSFH based microgripper

Belfiore

Broggiato

Verotti

et al. 2014

2014 23rd International Conference on Robotics in Alpe-Adria-Danube Region (RAAD)

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“…(Degree of Freedom) multi-hinge devices appeared in the literature, such as, for example, multi-axis MEMS (Micro-Electro-Mechanical Systems) gyroscopes [3], micro-mechanisms [4], and 3 D.o.F. micro-robots [5][6][7][8], which take advantage of the appearance of new micro-hinges [9][10][11] and microgrippers [12][13][14][15][16][17][18][19][20][21][22]. stress up to 216 MPa pressure showed that the fibrous morphology of KCC-1 remained unaffected [36].…”

Section: Introductionmentioning

confidence: 99%

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

et al. 2018

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Although some recent developments in nanotechnology made the prospects of a direct mechanical manipulation of micro-or nano-objects quite realistic, there are still several concerns and difficulties that affect such an endeavor. This is probably due to the large base of knowledge that is necessary to approach the problem of handling a nano-object by means of a nano-or micro-device. Therefore, any progress in this field is possible only by means of an integrated and interdisciplinary approach, which takes into account different aspects of the phenomenon. During the actual pioneering phase, there is a certain convenience in handling nano-objects that: (a) have peculiar known characteristics; (b) are easily recognizable, and (c) are interesting to the scientific community. This paper presents the interdisciplinary activities that were necessary to set up an experiment where specifically synthesized SiO 2 particles came in contact with the tips of specifically-designed and -fabricated nanomanipulators. SiO 2 mesoporous nanoparticles (KCC-1), having a peculiar dendritic structure, have been selected as a suitable nano-object because of the possibility to easily modulate their morphology. The expected contact force has been also calculated by means of Finite Element Analysis (FEA) electro-mechanical simulations.However, further miniaturization to the nano-scale is still possible, although there are still several severe concerns [23,24], and therefore, the study of the action of grasping a nanoparticle by means of a nano-gripper remains difficult under many points of view.Since, at the nanometric scale, materials behave quite differently from the bulk, understanding the size and shape dependence of physical properties in nanoparticles is a fundamental step towards the design, fabrication, and assembly of materials and devices with predictable behavior. In particular, the mechanical properties of nanoparticles may be of fundamental importance in controlling their performances in specific applications. Mechanical characterization of nanoparticles presents several challenges, it being difficult to prepare isolated nanoparticles on a substrate and to locate one individual nanoparticle. It is even more challenging to apply the required low loads on the nanoparticles, to measure the small deformations produced and to interpret the experimental data. Nano-indentation and Atomic Force Microscopy (AFM) are two common tools used for the mechanical characterization at the nanoscale level [25][26][27][28].Actually, the contacts between nano-gripper jaws and nanoparticles, with possible mechanical characterization of the nanoparticles, is still a rather unexplored field. Some techniques have been applied by means of AFM [29][30][31] or nano-indenters [32].This investigation presents the feasibility study of a nano-gripper to be used for the mechanical characterization of isolated nanoparticles. Firstly, the synthesis procedure and the morphological characterization by Scanning Electron Microscope (SEM) and Brunauer-Emmett-Teller (BE...

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“…Other than studying some portions of classic text books on micro and nano technology [2,3], more specific readings were suggested, related to the previous experience achieved by the teaching staff and concerning compliant 3 D.O.F. microrobots [4][5][6][7], micromechanisms [8], micro hinges [9][10][11][12] and microgrippers [13][14][15][16][17][18]. However, this material is essentially written text.…”

Section: Introductionmentioning

confidence: 99%

Learning Micromanipulation, Part 2: Term Projects in Practice

Bonciani¹,

Biancucci²,

Fioravanti³

et al. 2018

Actuators

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This paper describes the activities that have been necessary to design, fabricate, control and test some low-cost test stands independently developed by the students enrolled in the course of Micro-Nano sensors and actuators for the postgraduate course in Industrial Nanotechnologies Engineering of the University of Rome La Sapienza. The construction and use of these test stands are an essential part of teaching and learning methods whose theoretical bases have been presented in the companion paper (Part 1). Each test stand is composed of a compliant structure and a control system, which consists of a programmable control micro-card equipped with sensors and actuators. The compliant structure consists of a compliant mechanism whose geometry is achieved by scaling some previously developed silicon micromanipuators and microactuators up to the macroscale by a factor of 20. This macroscale model offered a kinesthetic tool to improve the understanding of the original microsystems and their working principles. The original silicon micromechanisms have been previously presented in the literature by the research group after design and deep reactive-ion etching (DRIE) microfabrication. Scaling from micro to macro size was quite easy because the original DRIE masks were bestowed to the students in the form of CAD files. The samples at the macroscale have been fabricated by means of recently available low-cost 3D printers after some necessary modifications of the mask geometry. The purpose of the whole work (Parts 1 and 2) was the improvement of the efficiency of an educational process in the field of microsystem science. By combining the two companion papers, concerning, respectively, the theoretical basis of the teaching methods and the students’ achievements, it is possible to conclude that, in a given class, there may be some preferred activities that are more efficient than others in terms of advancements and satisfaction.

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Kinetostatic optimization of a MEMS-based compliant 3 DOF plane parallel platform

Cited by 20 publications

References 15 publications

Development of a MEMS technology CSFH based microgripper

Development of a MEMS technology CSFH based microgripper

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

Learning Micromanipulation, Part 2: Term Projects in Practice

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