2002
DOI: 10.1134/1.1458988
|View full text |Cite
|
Sign up to set email alerts
|

Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: I. Production of CF2 and CF via electron-impact dissociation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2005
2005
2015
2015

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 8 publications
(2 citation statements)
references
References 48 publications
0
2
0
Order By: Relevance
“…The present work also requires knowledge of the partial dissociation cross-sections that produce the different CF x radicals. Considering the dissociation channel leading to CF 2 , we used the cross section obtained in our previous work [21]. Cross sections for two other dissociation channels into CF 3 and CF are determined using the total dissociation cross section taken from [20] with the ratio between different CF x channels from [22].…”
Section: Model Descriptionmentioning
confidence: 99%
“…The present work also requires knowledge of the partial dissociation cross-sections that produce the different CF x radicals. Considering the dissociation channel leading to CF 2 , we used the cross section obtained in our previous work [21]. Cross sections for two other dissociation channels into CF 3 and CF are determined using the total dissociation cross section taken from [20] with the ratio between different CF x channels from [22].…”
Section: Model Descriptionmentioning
confidence: 99%
“…5,6 Radicals in the plasmas are formed through dissociation of neutral species by electron impact or dissociative electron attachment, or by surface reactions. 5,[7][8][9] Radical loss processes are self-reaction, further dissociation through electron impact, surface reaction, or through electron attachment. 7,9,10 The latter is particularly intriguing because it replaces a concentration of radicals, which may directly etch a surface by reacting to form a volatile species, with anions, which are unlikely to interact with a surface due to the electronegative sheath surrounding the plasma.…”
Section: Introductionmentioning
confidence: 99%