Plasma Phys. Rep.
 2002
DOI: 10.1134/1.1458989
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Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: II. Production and loss of CF2 and CF in the processes of fluorocarbon polymerization

V. V. Ivanov
1
,
K. S. Klopovskii
2
,
Dmitry Lopaev
3
et al.
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