Kinetics of silicon film growth and the deposition phase diagram

Progress in Ultrasonic Spray Pyrolysis for Condensed Matter Sciences Developed From Ultrasonic Nebulization Theories Since Michael Faraday

“…A number of previous review articles have been presented on different forms of CVD: thermal CVD [2][3][4][5][6][7][8][9][10][11], plasma enhanced PE-CVD [12][13][14][15][16][17][18][19], hot-wire or hot filament (HWCVD or HFCVD) [20][21][22][23][24][25][26][27][28] and not many of them have been as exhaustive in their respective areas. Pyrolysis, although classified under CVD in some text, has become a wide area of research and technology covering synthesis of new products, qualitative and quantitative spectroscopic analysis of fluids and, lately, alternative route to production of debri-free x-ray sources; these aspects are elaborated further in the sections that follow.…”

Improvement of the efficiency of triple junction n–i–p solar cells with hot-wire CVD proto- and microcrystalline silicon absorber layers

“…In the case of the hot-wire deposition of μc-Si:H transition material, the crystallinity tends to decrease with an increasing layer thickness, which, after a certain thickness, results in an amorphous upper part of the layer [9]. This is in contrast with what is generally observed for plasma-enhanced CVD [12][13][14][15]. To stay on the microcrystalline side of the amorphous-to-microcrystalline phase transition, the hydrogen dilution is, as indicated above, increased after half of the layer has been deposited.…”

Amorphous and Microcrystalline Silicon Solar Cells

“…These processes are very much dependent on the deposition conditions. In general, crystalline growth is enhanced by the presence of atomic hydrogen, which chemically interacts with the growing surface [46,74,75].…”