Kinetics of Pyrolysis of Diborane¹

Catalyst Deactivation in Diborane Decomposition

“…Furthermore, even solid products were formed in the reactor. One of these could have been decaborane, which was also suggested in thermal decomposition by Bragg et al [18] and Fehlner et al [19]. The thermal decomposition of diborane was relatively slow at temperatures below 200°C, whereas at higher temperatures the decomposition proceeded with a higher rate.…”

“…These proposed products correspond well with the product distribution obtained in the current study. If the mechanism is extended to contain also the pyrolysis of heavier boron hydrides, the formation of hexaborane can be explained (table 2, entries [15][16][17][18][19][20][21][22][23][24].…”

Modeling studies of the chemical vapor deposition of boron films from B2H6

“…The chemistry of B 2 H 6 pyrolysis has been studied experimentally using mass spectroscopy to analyze reaction products as a function of temperature [26][27][28][29][30][31][32][33][34][35]. The possible gas-phase chemical reactions are very complex and include the formation of several high-order boranes (B 3 H 7 , B 4 H 10 and B 5 H 11 ).…”

Stability, local structure and electronic properties of borane radicals on the Si(1 0 0) 2 × 1:H surface: A first-principles study

“…Up to now many experimental efforts have been made to understand the chemical reactions related to the PureB process and the reaction products [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. There were early works on the structure of diborane [8] and its decomposition [9][10][11][12].…”

“…There were early works on the structure of diborane [8] and its decomposition [9][10][11][12]. Later on, various techniques were employed to study the deposition of boron from diborane [13][14][15][16].…”