Kinetics of in oxygen RF discharges

Kovalev, A. S.; Lopaev, Dmitry; Mankelevich, Yu. A.; Попов, Н. А.; Рахимова, Т. В.; Poroykov, A. Yu.; Carroll, David L.

doi:10.1088/0022-3727/38/14/010

Cited by 32 publications

(18 citation statements)

References 24 publications

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“…vdependent cross sections of excitation of O 2 (a,b) from O 2 (X) were considered in [231]. It is worth noting that the validation of the electron impact dissociation cross section and its v-dependence is still an open problem, with some indications that the dissociation cross sections based on Phelps [220] can be overestimated [232,233].…”

Section: O 2 and Omentioning

confidence: 99%

Advances in non-equilibrium $$\hbox {CO}_2$$ plasma kinetics: a theoretical and experimental review

et al. 2021

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Numerous applications have required the study of CO2 plasmas since the 1960s, from CO2 lasers to spacecraft heat shields. However, in recent years, intense research activities on the subject have restarted because of environmental problems associated with CO2 emissions. The present review provides a synthesis of the current state of knowledge on the physical chemistry of cold CO2 plasmas. In particular, the different modeling approaches implemented to address specific aspects of CO2 plasmas are presented. Throughout the paper, the importance of conducting joint experimental, theoretical and modeling studies to elucidate the complex couplings at play in CO2 plasmas is emphasized. Therefore, the experimental data that are likely to bring relevant constraints to the different modeling approaches are first reviewed. Second, the calculation of some key elementary processes obtained with semi-empirical, classical and quantum methods is presented. In order to describe the electron kinetics, the latest coherent sets of cross section satisfying the constraints of "electron swarm" analyses are introduced, and the need for self-consistent calculations for determining accurate electron energy distribution function (EEDF) is evidenced. The main findings of the latest zero-dimensional (0D) global models about the complex chemistry of CO2 and its dissociation products in different plasma discharges are then given, and full state-to-state (STS) models of only the vibrational-dissociation kinetics developed for studies of spacecraft shields are described. Finally, two important points for all applications using CO2 containing plasma are discussed: the role of surfaces in contact with the plasma, and the need for 2D/3D models to capture the main features of complex reactor geometries including effects induced by fluid dynamics on the plasma properties. In addition to bringing together the latest advances in the description of CO2 non-equilibrium plasmas, the results presented here also highlight the fundamental data that are still missing and the possible routes that still need to be investigated.

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Section: O 2 and Omentioning

confidence: 99%

Advances in non-equilibrium $$\hbox {CO}_2$$ plasma kinetics: a theoretical and experimental review

et al. 2021

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“…The same reactions, cross sections and collisional probabilities are considered in both models (1D and 0D). These are based on the works by Ivanov et al [1999]; Vasiljeva et al [2004]; Kovalev et al [2005]; Braginskiy et al [2005]; Booth et al [2019Booth et al [ , 2022. 7 charged species and 8 neutral species are described by the kinetic scheme: e…”

Section: Modelling Datamentioning

confidence: 99%

Benchmarking between fluid and global models for low-pressure oxygen DC glow discharges

Viégas¹,

Dias²,

Fromentin³

et al. 2022

Preprint

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This work focuses on the benchmarking between a zero-dimensional (0D) global model (LoKI) and a one-dimensional (1D) radial fluid model for the positive column of oxygen DC glow discharges in a tube of 1 cm inner radius at pressures between 0.5 Torr and 10 Torr. The data used in the two models are the same, so that the difference between the models is reduced to dimensionality. A good agreement is found between the two models on the main discharge parameters, with relative differences below 5%. The agreement on species average number densities, charged and neutral, is slightly worse, with relative differences increasing with pressure from 11% at 0.5 Torr to 57% at 10 Torr. The success of the 0D global model in describing these plasmas through volume averaged quantities decreases with pressure, due to pressuredriven narrowing of radial profiles. Hence, in the studied conditions, we recommend the use of volume-averaged models only in the pressure range up to 10 Torr.

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“…Electron collision with molecular oxygen is significant in the physics and chemistry of the earth’s and planetary atmospheres. It plays an essential role in the chemistry of oxygen discharge, − the space vehicle earth (re-)entry problem, − as well as both astrophysics and laboratory oxygen plasma. − In the multiple processes in which an electron impacts the molecular oxygen target, electronic (de-)excitation is quite meaningful and promising. The excited states of molecular oxygen participate in many physical and chemical processes.…”

Section: Introductionmentioning

confidence: 99%

R-Matrix Calculation of Electron Collisions with Molecular Oxygen in Its Electronically Excited States

2022

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Low-energy electron collisions with the X3Σg– ground state and a1Δg and b1Σg+, the Herzberg states (c1Σu –, A′3Δu, and A3Σu+), and B3Σu – excited states of the O2 molecules are studied using the fixed-nucleus R-matrix method. Integral elastic scattering and electronic excitation cross sections from the X3Σg – ground state overall agree well with the available experimental and theoretical results. The electronic (de-)excitation cross sections for the electron impact with the Herzberg states and the B3Σu – state are reported. The value of elastic cross sections for the six excited states decreases with the increment of electron energy, except for the resonance peaks. As the case of excitation from the X3Σg – ground state, the O2 – 2Πu resonance makes a dominant contribution to the (de-)excitation cross sections from the a1Δg, b1Σg +, and the Herzberg states. The magnitude of the de-excitation cross sections at the location of the 2Πu resonance from the Herzberg states to the ground state is about 2 to 8 times those of the excitation cross sections for the corresponding excitation transitions. These results should be significant for models of oxygen plasma and the dynamics of the Herzberg states of molecular oxygen in the earth’s atmosphere.

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Kinetics of in oxygen RF discharges

Cited by 32 publications

References 24 publications

Advances in non-equilibrium $$\hbox {CO}_2$$ plasma kinetics: a theoretical and experimental review

Advances in non-equilibrium $$\hbox {CO}_2$$ plasma kinetics: a theoretical and experimental review

Benchmarking between fluid and global models for low-pressure oxygen DC glow discharges

R-Matrix Calculation of Electron Collisions with Molecular Oxygen in Its Electronically Excited States

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