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2019
DOI: 10.1007/s11705-019-1837-9
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Kinetic Monte Carlo simulations of plasma-surface reactions on heterogeneous surfaces

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Cited by 7 publications
(5 citation statements)
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References 38 publications
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“…However, the mechanisms responsible for O atoms recombination are still under debate. Different modeling approaches have been used to get insight into these mechanisms, including DFT [389][390][391][392], molecular dynamics [370,[393][394][395], Kinetic Monte Carlo [396][397][398][399][400][401][402][403] and mesoscopic deterministic models [365,368,385,386,[404][405][406][407][408].…”
Section: Surface Recombination Of Atomic Oxygenmentioning
confidence: 99%
“…However, the mechanisms responsible for O atoms recombination are still under debate. Different modeling approaches have been used to get insight into these mechanisms, including DFT [389][390][391][392], molecular dynamics [370,[393][394][395], Kinetic Monte Carlo [396][397][398][399][400][401][402][403] and mesoscopic deterministic models [365,368,385,386,[404][405][406][407][408].…”
Section: Surface Recombination Of Atomic Oxygenmentioning
confidence: 99%
“…An assessment of the need to consider different elementary processes is also required. For instance, physisorption on top of chemisorption sites, dissociative chemisorption (Nave et al 2014, Kroes 2021, abstraction (Sholl 1997, Khanom et al 2003 or a distribution of reactivity among the adsorption sites (Donnelly et al 2011, Marinov 2019) may have to be included. Nevertheless, once the relevant mechanisms have been identified, the extension of the current model to describe any of them is straightforward.…”
Section: Discussionmentioning
confidence: 99%
“…Understanding plasma–catalyst interphase reactions has been obtained from both experimental and simulation analysis. Some of the representative reviews have concluded the achievements of simulation studies. , However, the simulation relies on the initial treatment parameters, but the condition fluctuates in actual practices. Therefore, simulation techniques such as KMC models are unlikely to be capable of giving detailed plasma–catalyst interphase interactions .…”
Section: Mechanisms Of Ntps Modificationmentioning
confidence: 99%
“…Some of the representative reviews have concluded the achievements of simulation studies. , However, the simulation relies on the initial treatment parameters, but the condition fluctuates in actual practices. Therefore, simulation techniques such as KMC models are unlikely to be capable of giving detailed plasma–catalyst interphase interactions . Logically, there is increasing interest in developing techniques to detect the plasma modification process by employing in situ interaction analysis (e.g., Langmuir probes, OES, LIF, mass spectrometry, in situ Fourier transformed infrared spectroscopy) and ex situ modified surface analysis (e.g., AC-transmission electron microscope, X-ray photoelectron spectroscopy, Brunauer–Emmett–Teller, scanning electron microscopy, Fourier transformed infrared spectroscopy) tools.…”
Section: Mechanisms Of Ntps Modificationmentioning
confidence: 99%