2002
DOI: 10.1103/physrevb.66.235412
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Kinetic Monte Carlo–molecular dynamics investigations of hyperthermal copper deposition on Cu(111)

Abstract: Detailed KMC-MD (kinetic Monte Carlo-molecular dynamics) simulations of hyperthermal energy (10-100 eV) copper homoepitaxy have revealed a re-entrant layer-by-layer growth mode at low temperatures (50K) and reasonable fluxes (1 ML/s). This growth mode is the result of atoms with hyperthermal kinetic energies becoming inserted into islands when the impact site is near a step edge. The yield for atomic insertion as calculated with molecular dynamics near (111) step edges reaches a maxima near 18 eV. KMC-MD simul… Show more

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Cited by 80 publications
(46 citation statements)
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“…The most efficient tool to simulate the evolution of the adisland morphology is the Kinetic Monte-Carlo (KMC [23,24,25]) method which needs as input the various rates of all the elementary atomic processes. Two types of processes are essential in this respect: the diffusion along steps (and its anisotropy between step A and step B), and the corner crossings to go from one edge to another.…”
Section: Introductionmentioning
confidence: 99%
“…The most efficient tool to simulate the evolution of the adisland morphology is the Kinetic Monte-Carlo (KMC [23,24,25]) method which needs as input the various rates of all the elementary atomic processes. Two types of processes are essential in this respect: the diffusion along steps (and its anisotropy between step A and step B), and the corner crossings to go from one edge to another.…”
Section: Introductionmentioning
confidence: 99%
“…Various atomistic processes such as ion enhanced mobilities, cluster dissociation [1], and defect creation [2,4] have been suggested to explain this. However, in particular, in LEID it is a remarkable fact that the growth properties do not seem to depend much on the details of ion bombardment.…”
mentioning
confidence: 99%
“…In HTD the reversibility of growth is manifested through enhanced adatom detachment from islands [1,4]. Detachment and island mobility allow us to neglect spatial correlations between islands [20,21,22,23], which justifies the rate equation description of the problem.…”
Section: Modelmentioning
confidence: 99%
“…In LEID this form for the detachment rate is physically a well justified choice, because in the regime of bombarding energies from 10 eV to 100 eV adatom detachment dominates and island breakup into larger pieces is not expected to occur [4,25]. Moreover, since every deposition event at the vicinity of an island boundary can be assumed to detach adatoms at least with a probability proportional to the island perimeter (i.e.…”
Section: Modelmentioning
confidence: 99%
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