2021
DOI: 10.1016/j.commatsci.2021.110607
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Kinetic Monte Carlo method for epitaxial 3C-SiC (0001) growth on vicinal surfaces

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Cited by 4 publications
(1 citation statement)
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“…Studies that investigate gas adsorption, catalysis reactions, and crystal growth using KMC show that commonly the adsorption reaction has the lowest energy barrier, followed by surface diffusion and the desorption reactions. [66][67][68][69] However, in these studies, the crystal surface is in contact with a gas phase and temperatures are elevated compared to our conditions. As a first indication, the available literature suggests that surface diffusion is more important than desorption due to the potentially lower energy barriers.…”
Section: Kmc Model Simplificationsmentioning
confidence: 82%
“…Studies that investigate gas adsorption, catalysis reactions, and crystal growth using KMC show that commonly the adsorption reaction has the lowest energy barrier, followed by surface diffusion and the desorption reactions. [66][67][68][69] However, in these studies, the crystal surface is in contact with a gas phase and temperatures are elevated compared to our conditions. As a first indication, the available literature suggests that surface diffusion is more important than desorption due to the potentially lower energy barriers.…”
Section: Kmc Model Simplificationsmentioning
confidence: 82%