Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment

Samartsev, A.V.; Wucher, A.

doi:10.1016/j.apsusc.2006.02.081

Cited by 12 publications

(10 citation statements)

References 19 publications

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“…We attribute this finding to the changing nature of the sputter emission process between atomic and cluster projectiles. In fact, the analysis of the emission energy distributions of sputtered indium atoms under gold projectile bombardment has provided convincing evidence for a drastic change from a linear cascade‐like behavior for atomic projectiles to a collisional spike following a cluster impact . Molecular dynamics simulations of such emission events have proven very helpful to understand the nature of these changes.…”

Section: Resultssupporting

confidence: 77%

“…In fact, the analysis of the emission energy distributions of sputtered indium atoms under gold projectile bombardment has provided convincing evidence for a drastic change from a linear cascadelike behavior for atomic projectiles to a collisional spike following a cluster impact. [12,13] Molecular dynamics simulations of such emission events have proven very helpful to understand the A similar situation has been presented for a 6-keV Ag 3 impact onto the same surface earlier. [13] The difference is evident.…”

Section: Resultsmentioning

confidence: 89%

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Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment

Samartsev

Heuser

Wucher

2012

Surface & Interface Analysis

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The ionization probability of indium atoms sputtered from a polycrystalline indium surface under bombardment with 10-keV Au m À cluster ions was measured by comparative secondary ion and neutral time-of-flight (ToF) mass spectrometry. The gold projectile ion beam for time-of-flight spectrum acquisition was interleaved with a 5-keV Ar + ion beam to maintain a dynamically sputter cleaned state of the surface, thereby avoiding contamination from both residual gas adsorption as well as accumulating gold from the cluster projectile beam. It is found that under these conditions the ionization probability does not significantly change as a function of cluster projectile nuclearity, a result which is in marked contrast with similar experiments where the interleaved rare gas ion beam was not used. The comparison of both experiments reveals that in the latter case the ionization probability is strongly influenced by surface contamination. Interestingly, the magnitude of this influence seems to depend on the projectile cluster size. This finding is interpreted in terms of the change in the ejection mechanism between atomic and polyatomic projectiles leading to different average escape depths of the sputtered atoms.

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Section: Resultssupporting

confidence: 77%

Section: Resultsmentioning

confidence: 89%

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment

Samartsev

Heuser

Wucher

2012

Surface & Interface Analysis

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“…[21], it was assumed that the emission velocity distribution of sputtered atoms does not change between atomic and cluster impact. Measurements of the kinetic energy distribution of sputtered indium atoms performed later, on the other hand, reveal a strong alteration of the emission velocity distribution by changing from 5-keV Au to 10-keV Au 2 projectiles [26]. More specifically, it was shown that the velocity distribution under cluster bombardment is dominated by a low energy contribution arising from the collisional spike, whereas the spectrum measured for atomic projectiles reflects the typical linear cascade distribution.…”

Section: Experimental Sputter Yields and The Velocity Distributionmentioning

confidence: 97%

The influence of crater formation for electron excitation processes in cluster induced collision cascades

Weidtmann

Duvenbeck

Wucher

2015

Nuclear Instruments and Methods in Physics Research Section B:

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“…The conversion of the flight time distribution S(t f ) into a velocity distribution f (v) via the transformation f (v) ∝ S(t f ) x t f has been described before 26,27 . To obtain data suitable for a quantitative analysis of the velocity distribution, several parameters can be optimized as e.g.…”

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confidence: 99%

Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions

Skopinski

Ernst

Herder

et al. 2021

Review of Scientific Instruments

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We describe a setup for the analysis of secondary ions and neutrals emitted from solid surfaces and two-dimensional materials during irradiation with highly charged ions. The ultra-high-vacuum setup consists of an electron beam ion source to produce bunches of ions with various charge states q (e.g. Xe 1+ -Xe 46+ ) and thus potential energies, a deceleration/acceleration section to tune the kinetic energy of the ions in the range of 5 keV to 20 x q keV, a sample stage for laser-cleaning and positioning of freestanding as well as supported samples, a pulsed excimer laser for postionization of sputtered neutrals, and a reflectron type time-of-flight mass spectrometer enabling us to analyze mass and velocity distributions of the emitted particles. With our setup, contributions from potential and kinetic energy deposition can be studied independently of each other. Charge dependent experiments conducted at a constant kinetic energy show a clear threshold for the emission of secondary ions from SrTiO 3 . Data taken with the same projectile charge state, but at a different kinetic energy, reveals a difference in the ratio of emitted particles from MoS 2 . In addition, first results are presented, demonstrating how velocity distributions can be measured with the new setup.

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Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment

Cited by 12 publications

References 19 publications

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment

The influence of crater formation for electron excitation processes in cluster induced collision cascades

Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions

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Kinetic energy distributions of neutral In and In2 sputtered by polyatomic ion bombardment

Cited by 12 publications

References 19 publications

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Aum− ion bombardment

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Aum− ion bombardment

The influence of crater formation for electron excitation processes in cluster induced collision cascades

Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions

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Product

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Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment

Ionization probabilities of sputtered indium atoms under atomic and polyatomic Au_m⁻ ion bombardment