Kinematic Calibration of a 3DOF Compliant Nanopositioning Stage Based on Visual Measurement

Xu, Nuo; Li, Hai; Zhang, Xianmin; Yuan, Lei; Zhu, Benliang

doi:10.1109/marss58567.2023.10294121

2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) 2023

DOI: 10.1109/marss58567.2023.10294121

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Kinematic Calibration of a 3DOF Compliant Nanopositioning Stage Based on Visual Measurement

Nuo Xu,

Hai Li,

Xianmin Zhang

et al.

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Kinematic Calibration of a 3DOF Compliant Nanopositioning Stage Based on Visual Measurement

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References 16 publications

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