Key Technologies and Design Methods of Ultra-Precision Aerostatic Bearings

Abstract

Precision measurement technology and instruments are the basis for high-quality development in modern industry. With the specialization of supporting facilities, ultra-precision motion guidance has become a core technology to achieve ultra-precision measurement. Aerostatic bearings have the advantages of low friction and high precision, and are gradually playing an irreplaceable role in precision measurement and instruments. This paper summarizes and puts forward two contradictions for improving the loading capacity of aerostatic bearings, and investigates how to solve them via structural design. This paper analyzes the characteristics of the engineering calculation method, the gauge pressure ratio method, the gas resistance calculation method, and the AFVM (adaptive finite volume method) proposed. Finally, this paper summarizes the application scope of each method, gives solutions to the core problems, and outlines the developing trends.