2004
DOI: 10.1103/physrevb.70.085320
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Kelvin probe force microscopy of semiconductor surface defects

Abstract: We present a comprehensive three-dimensional analysis of Kelvin probe force microscopy of semiconductors. It is shown that high-resolution electronic defect imaging is strongly affected by free carrier electrostatic screening, and the finite size of the measuring tip. In measurements conducted under ambient conditions, defects that are not more then 2 nanometers below the surface, and are at least 50 nanometers apart can be imaged only if the tip-sample distance is not larger then 10 nanometers. Under ultrahig… Show more

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Cited by 192 publications
(154 citation statements)
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References 22 publications
(22 reference statements)
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“…The strength of KPFM is the capability to measure contact potential with a high spatial resolution, as demonstrated by imaging different materials [11], different doping in semiconductors [32] and localized charges [33]. Looking at the work function images in Figs.…”
Section: Lateral Variations In the Work Functionmentioning
confidence: 99%
“…The strength of KPFM is the capability to measure contact potential with a high spatial resolution, as demonstrated by imaging different materials [11], different doping in semiconductors [32] and localized charges [33]. Looking at the work function images in Figs.…”
Section: Lateral Variations In the Work Functionmentioning
confidence: 99%
“…The (110) surface of GaAs and other III-V semiconductors have been previously demonstrated to display charging of their step edges. 2,3,4 The sign of the charge was found to depend on the doping of the semiconductor, but a detailed understanding in terms of the geometric and electronic structure of the step edges was lacking. From a theoretical perspective, steps of various orientations on GaAs(110) have been studied.…”
Section: Introductionmentioning
confidence: 99%
“…It has been applied to characterize various types of solids used in electronic devices such as ionic crystal thin films, 2 semiconductors, 3 organic solar cell structures, 4 and nanographenes 5 in order to study the sample lateral variations of surface potentials and work functions and infer the electronic structures.…”
Section: Introductionmentioning
confidence: 99%