Different single and polycrystalline surfaces of Cu and Ag have been investigated by Time-Of-Flight low-energy ion scattering using 4 He + ions. The fraction of ions that survived single scattering from the outermost surface layers, P + , was measured in different neutralization regimes. At low energies, a distinct difference in P + was observed for non-equivalent Cu crystal surfaces for projectiles backscattered in a single collision. The polycrystalline surface was found to exhibit similar neutralization behaviour as the (111) single crystal surface. At higher energies, P + shows a strong dependence on the angular orientation of the single crystal. The impact of these findings on quantitative surface composition analysis by LEIS is discussed.