K-cut SAW resonator with both static and dynamic zero temperature coefficients

Takagi, Michiaki; Momosaki, E.; Yamakita, M.; Oura, N.

doi:10.1109/freq.1996.559867

Cited by 5 publications

(2 citation statements)

References 7 publications

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“…where m is the surface mass density. Equation ( 2) is an extension of the transverse equation 11,13) for the y-coordinate in the longitudinal direction.…”

Section: Equation Of In-harmonics 211 Lagrangian For Vibration Of Saw...mentioning

confidence: 99%

Analysis of Frequency Locations of the In-Harmonics in Quartz Surface Acoustic Wave Resonators Using Helmholtz Equations

Takagi¹,

Kanna²,

Matsumoto

2007

jjap

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Preventing spuriousness in a quartz surface acoustic wave (SAW) resonator is important for maintaining reliability in digital communication systems because it reduces phase noise quality of signals. For such a resonator, the in-harmonic modes, which are also undesirable responses in the direction of the lengthwise x-coordinate and the transversal y-coordinate, have been studied. We show that the governing equation of the resonator is given by a Helmholtz equation, and we obtain equations corresponding to the resonance frequencies. We solve them theoretically for transverse modes, and numerically using a T matrix for longitudinal modes. We obtain a frequency-mode chart of a one-port quartz SAW resonator and obtain adequate agreement of accuracy with in-harmonics that involve two-dimensional modes. Furthermore, we study mesa-structure-type SAW resonators to determine a method of controlling the frequency arrangement.

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“…where m is the surface mass density. Equation ( 2) is an extension of the transverse equation 11,13) for the y-coordinate in the longitudinal direction.…”

Section: Equation Of In-harmonics 211 Lagrangian For Vibration Of Saw...mentioning

confidence: 99%

Analysis of Frequency Locations of the In-Harmonics in Quartz Surface Acoustic Wave Resonators Using Helmholtz Equations

Takagi¹,

Kanna²,

Matsumoto

2007

jjap

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“…A low temperature coefficient of delay (TCD) and a large electromechanical coupling coefficient (K 2 ) allow for a narrower frequency bandwidth to be utilized for a given communication channel, thus increasing the number of communication channels that can be placed in a given frequency spectrum. Generally, most materials have a positive TCD, only a few materials such as ST-cut quartz and SiO 2 films have negative TCD [1][2][3][4][5][6]. With a proper thickness ratio of ZnO to SiO 2 , the combination of ZnO film having positive TCD with SiO 2 film having negative TCD can achieve temperature compensation at a specific frequency.…”

Section: Introductionmentioning

confidence: 97%

Temperature compensation of SAW in ZnO/SiO/sub 2//Si structure

Emanetoglu²,

Tong³

et al.

2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263)

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Temperature stability is a critical issue for SAW devices in communication and sensor applications. The negative temperature coefficient of delay (TCD) of SiO 2 makes it suitable as a compensation layer in multilayer structures where the piezoelectric layer possesses a positive TCD. In this work, the SAW propagation properties, including velocity dispersion, electro-mechanical coupling coefficients, and propagation attenuation in ZnO/SiO 2 /Si structures are investigated using the transfer matrix method. For different thickness ratios of ZnO to SiO 2 , temperature compensation of the second GSAW modes at frequencies in the range of 1GHz to 3 GHz is calculated. The simulation results show good temperature stability at 2.4 GHz when the ZnO:SiO 2 thickness ratio is 2:3 and total film thickness is 3 m.

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