K-0704 Nano-indentatiom tests for Evaluation of Mechanical Properties of a-Si:C:H thin film deposited by PE-CVD method

Tanibuchi, Takahito; Muramoto, Kenichi; Isono, Yoshitada; Tanaka, Takeshi

doi:10.1299/jsmemecjo.i.01.1.0_297

The Proceedings of the JSME Annual Meeting

2001

DOI: 10.1299/jsmemecjo.i.01.1.0_297

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K-0704 Nano-indentatiom tests for Evaluation of Mechanical Properties of a-Si:C:H thin film deposited by PE-CVD method

Takahito Tanibuchi

Kenichi Muramoto

Yoshitada Isono

et al.

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K-0704 Nano-indentatiom tests for Evaluation of Mechanical Properties of a-Si:C:H thin film deposited by PE-CVD method

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