Jet‐Assisted Aerosol CVD for Multicomponent Particle Deposition

Abstract

Aerosol CVD has been extensively utilized to manufacture high-quality optical fibers in which multicomponent aerosols are generated and deposited. Our earlier study proposed a jet-assisted aerosol CVD in which high-temperature internal jets were used inside a conventional silica tube reactor of a modified (M)CVD method, and showed the enhancement of deposition performance for single component SiO 2 particle deposition. In the present study, we apply this method to the deposition of multicomponent particles and demonstrate that our method of jet-assisted aerosol CVD not only significantly improves overall particle deposition efficiency, but also enhances the uniformity of composition of multicomponent SiO 2 /GeO 2 particle deposition. The existence of an optimum jet flow rate for the maximum deposition efficiency has been found. A nitrogen jet has also been used and found to produce almost the same improvement for particle deposition performance as in the case of a helium gas jet.

Active Optical Fibers and Components for Fiber Lasers Emitting in the 2-μm Spectral Range

“…Lower electrostatic forces on the nanoparticles’ surface allows to increase the final dopant concentration and to also improve the spatial homogeneity of the fibers [ 44 , 45 , 46 ]. Despite the rapid development of advanced deposition methods, such as direct nanoparticle deposition [ 47 ], aerosol deposition [ 48 ], or chelate deposition [ 49 ], the ND method remained the favorable technology for its feasibility and cost effective technological equipment.…”

The incorporation of noble metal nanoparticles into host matrix thin films: synthesis, characterisation and applications

“…61 Further modification of this technique has been carried out by Hong et al using an injected jet assisted modified CVD (MCVD) system to apply a thin film to optical fibres. 62 An electrically heated thin tube was placed in a radial direction inside a conventional modified CVD silica tube. The injected gas enhanced the deposition efficiency and uniformity of the composition of the multi-component thin film independent of the type of gas used in the jet.…”