J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating

Uesugi, Akio; Yasutomi, Takahiro; Hirai, Yoshikazu; Tsuchiya, Toshiyuki; Tabata, Osamu

doi:10.1299/jsmemecj.2014._j2240303-

The Proceedings of Mechanical Engineering Congress, Japan

2014

DOI: 10.1299/jsmemecj.2014._j2240303-

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J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating

Akio Uesugi

Takahiro Yasutomi²,

Yoshikazu Hirai³

et al.

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J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating

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