ITO thin film thermocouple for transient high temperature measurement in scramjet combustor

Jin, Xinhang; H., B.; Qiu, Tiancheng; Deng, Jinjun

doi:10.1109/transducers.2017.7994256

Cited by 11 publications

(5 citation statements)

References 9 publications

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“…In order to enhance the temperature resistance of TFTCs and increase their upper limit for temperature measurement, protective layers were developed to prevent oxidation and volatilization [34][35][36], and transition layers were added to mitigate thermal stress [14,[36][37][38][39]. However, TFTCs of twodimensional planar-type (figure 1(a)) affected the thermal fluids pattern or lost the accuracy when it was installed in the test space as shown in the figure 1 [16,40]. Furthermore, the whole planar-type TFTCs were placed in the test environment, and the parallel orientation of the electrode film to the flow field led to a temperature rise of the cold end, which challenges the connection between wires and TFTCs [41].…”

Section: Introductionmentioning

confidence: 99%

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Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Fan,

Tian,

Shi

et al. 2024

Int. J. Extrem. Manuf.

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High-temperature thin-film thermocouples (TFTCs) have garnered significant attention in aerospace and steel metallurgy industries. However, previous studies on TFTCs have primarily focused on the two-dimensional planar type, whose thermal sensitive area has to be perpendicular to the test environment, and therefore affects the thermal fluids pattern or loses the accuracy. In order to address this problem, recent studies have developed the three-dimensional probe-type TFTCs, which can be set parallelly to the test environment. Nevertheless, the probe-type TFTCs are limited by their measurement threshold and poor stability at high-temperature. To address these issues, in this study, we propose a novel probe-type TFTCs temperature sensor with a sandwich structure. The sensitive layer is compounded with indium oxide (In2O3) doped zinc oxide (ZnO) and fabricated using screen-printing technology. With the protection of sandwich structure on electrode film, the sensor demonstrates robust high-temperature stability, enabling continuous working at 1200 °C above 5 hours with a low drift rate of 2.3 °C/h. This sensor exhibits a high repeatability of 99.3% when measures the low to high temperatures, which is beyond the most existing probe-type TFTCs reported in the literature. With its excellent high-temperature performance, this temperature sensor holds immense potential for enhancing equipment safety in the aerospace engineering and ensuring product quality in steel metallurgy industries.

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Section: Introductionmentioning

confidence: 99%

“…airflow erosion (figure 1(d)). Table 1 shows a comparison of the probe TFTC in this study with other TFTCs [16,40,41,[44][45][46]. Compared with the traditional probe-type TFTC (figure 1(b)), the films of the sensor in this study (figure 1(c)) are prepared on the inner plane side of semicylinder and end face of the cylinder.…”

Section: Introductionmentioning

confidence: 99%

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Fan,

Tian,

Shi

et al. 2024

Int. J. Extrem. Manuf.

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“…A platinum (Pt) film, which is well known for its advantages of high melting point, excellent chemical stability, and low interference of surface thermal and aerodynamic performance, − has been widely used in the fabrication of sensors including temperature, heat flow, strain and other sensors. − In recent years, with the increasing demands of automation and intelligent manufacturing in key equipment, how to integrate sensors into components efficiently and nondestructively has become more and more important, particularly in the application of high-temperature components in the aerospace industry.…”

Section: Introductionmentioning

confidence: 99%

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Wang

Ouyang

et al. 2023

ACS Appl. Mater. Interfaces

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In this paper, laser micro-cladding technology (LMC) was conducted to prepare high-temperature Pt thick film sensors in situ. The formability, microstructure, sintering mechanism, and electrical properties of the LMCed Pt thick films were first studied systematically. Results indicated that with the increase of laser power density, the sintering degree of the Pt thick film increased obviously, improving its adhesion strength and reducing its resistivity. However, when the laser power density exceeded the threshold, holes or grooves were formed in the Pt film, leading to the degeneration of its properties. A Pt thick film with good adhesion strength, excellent conductive networks, and the minimum resistivity (46 ± 2 μΩ•cm) was obtained at a laser power density of 1.37 × 10 6 W•cm −2 . Then, Pt thick film temperature sensors (including Pt thermal resistance temperature (RTD) and Pt−Pt10%Rh thermocouple sensors) were conformally prepared by LMC. Their temperature-sensing performance became stable after the initial high-temperature calibration, with a linearity of 0.9985 for the RTD with a TCR of 2.46 × 10 −3 /°C (at 920 °C) and a linearity of 0.9905 for the thermocouple with a Seebeck coefficient of 9.7 μV/°C, both of which are better than that made by direct DC magnetron sputtering deposition. Therefore, this work provides a novel feasible way to conformally integrate high-performance Pt film sensors in situ.

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“…High-temperature monitoring in confined spaces, such as a combustion chamber of an engine, applies harsh requirements on thermosensitive parts [ 1 , 2 , 3 , 4 , 5 ]. Compared to conventional wire and foil thermocouples, thin film thermocouple (TFTC) by microelectromechanical system (MEMS) process has the advantages of fast response speed and small size due to its low thermal mass and process [ 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

et al. 2022

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Tungsten-rhenium thin film thermocouples (TFTCs) are well suited for the surface temperature monitoring of hot components due to their small size, rapid response and low cost. In this study, a tungsten-rhenium TFTC with SiC protective film on all parts except the pads was fabricated by a microelectromechanical system (MEMS) process. During the low to medium temperature (−40 °C to 500 °C) repeatability test phase, the thermal voltage from the TFTC agreed well with that of the standard tungsten-rhenium thermocouple. However, during the high temperature test phase, the TFTC lost electronic response at around 620 °C. Failure analysis of the TFTC tested at 620 °C was performed by microscopy, scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), laser scanning confocal microscope (LSCM) and statistics. The results showed that the pads were oxidized without the protective layer, the number of oxidized protrusions distributed in this TFTC from the pad to the node decreases more and more slowly and the size of the oxidized protrusions also becomes smaller and smaller. This demonstrates the presence of horizontal oxidation diffusion in TFTCs, further illustrating the importance of pad protection and provides a direction for the subsequent structural optimization and the extension of the service life of TFTCs and other sensors.

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ITO thin film thermocouple for transient high temperature measurement in scramjet combustor

Cited by 11 publications

References 9 publications

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

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ITO thin film thermocouple for transient high temperature measurement in scramjet combustor

Cited by 11 publications

References 9 publications

Sandwich probe temperature sensor based on In2O3-IZO thin film for ultra-high temperatures

Sandwich probe temperature sensor based on In2O3-IZO thin film for ultra-high temperatures

Studies on the Platinum Thick Film Sensor Conformally Written by Laser Micro-Cladding: Formability, Microstructure, and Performance

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

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Product

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Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures

Sandwich probe temperature sensor based on In₂O₃-IZO thin film for ultra-high temperatures