Abstract:Negative stiffness can provide a method of altering the stiffness of a device without changing its geometry. The silicon/ silicon dioxide (Si/SiO 2 ) membrane presented in this research utilizes buckling resulting from compressive residual stress. A transversely actuated buckled membrane displays properties similar to a linear regressive spring, which include a positive and negative stiffness region. Cantilever beams were used to restrict the outward displacement of the membrane and force it to actuate only in… Show more
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