Poly-and single-crystal thin films of U-Mo alloys have been grown both on glass and sapphire substrates by UHV magnetron sputtering. X-ray and Electron Backscatter Diffraction data indicate that for single-crystal U 1-x Mo x alloys, the pure cubic uranium -phase exists for x 0.22 (10 wt.% Mo). Below 10 wt.% Mo concentration, the resulting thin film alloys exhibited a mixed α-γ uranium phase composition.