Iron segregation in LEC InP crystals

Abstract

Following the recent results about activation of iron diffused in InP [ 11 we tried to increase the fraction of electrically active Fe atoms in InP crystals grown by the Liquid Encapsulation Czochralski method (LEC) by applying a type of "in-situ" annealing. Actually, by varying the pulling rate and the cooling rate, we observed that the FeactivJFeto,l ratio can be modified. Though the ratio is normally ranging between 0.60 and 0.70, it is found that the ratio is slighty higher corresponding to low pulling rates and considerably lower for pulling rates > 14 mm/h. The purpose of this paper is that of showing how these growth parameters affect the Fe,ti,JFe,a ratio.