1985
DOI: 10.1063/1.335468
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Iron and the iron-boron complex in silicon

Abstract: Iron has been diffused into p- and n-type silicon containing various concentrations of carbon and oxygen. Apart from the established iron interstitial level and the iron-boron complex, no new centers were detected involving iron complexing with either the carbon or the oxygen. The iron-boron level was shown to dissociate by a recombination-enhanced mechanism and a deep acceptor level of this complex was detected at Ec −0.29 eV, which must be the recombination level rather than the well-established level at Ev … Show more

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Cited by 88 publications
(39 citation statements)
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“…32 In the present case enhanced absolute Chi 2 values in the range of 0.32 to 0.55 reveal a medium quality of the SRH fits, which queries the accuracy of the spectroscopic TDLS results. A visual inspection of the fitted TDLS curves shows that the slope of the fitted curves slightly overestimates the actually measured Arrhenius slope in both cases (see Figs.…”
Section: B Reduced Fit Quality and Its Impact On The E T Determinationsupporting
confidence: 76%
“…32 In the present case enhanced absolute Chi 2 values in the range of 0.32 to 0.55 reveal a medium quality of the SRH fits, which queries the accuracy of the spectroscopic TDLS results. A visual inspection of the fitted TDLS curves shows that the slope of the fitted curves slightly overestimates the actually measured Arrhenius slope in both cases (see Figs.…”
Section: B Reduced Fit Quality and Its Impact On The E T Determinationsupporting
confidence: 76%
“…14 and 29-34͒ and a deep acceptor level near E c − 0.29 eV. 20,30,34 These values have recently been confirmed by temperature-dependent and injection-dependent lifetime spectroscopy data. 35 A second acceptor level at E v + 0.074 eV ͑Refs.…”
Section: Introductionmentioning
confidence: 59%
“…In particular, the atomic configuration and energy level of an Fe-B pair have been studied by electron spin resonance (ESR) measurement [1][2][3] and deep-level transient spectroscopy (DLTS). [4][5][6][7][8] Moreover, the recombination-enhanced dissociation of the Fe-B pair has been observed by ESR 3) and DLTS. 5,9) On the other hand, the change in the charge state of the isolated Fe by the capture of a carrier has attracted little attention.…”
Section: Introductionmentioning
confidence: 92%