1984
DOI: 10.1016/0025-5408(84)90105-3
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Ionic conductivity of LiF thin films containing Di- or trivalent metal fluorides

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Cited by 33 publications
(29 citation statements)
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“…The films had a Li:Al ratio of 2.7:1, as determined with ICP-MS and carbon, silicon and oxygen impurities were below the XPS detection limit. The films had an ionic conductivity of 7.5 × 10 −6 S/cm at room temperature [146], which is similar to the first reports from the literature on thermally evaporated amorphous Li 3 AlF 6 films [12,13]. Interestingly, changing the pulsing ratio to three subcycles of AlF 3 and one LiF resulted in the same metal ratio in the as-deposited film as the pulsing ratio of 1:1, suggesting a similar conversion reaction as we have seen in our experiments on LiF [151] and Li 3 AlF 6 [139].…”
Section: Ald Of Metal Fluorides Using Hf As the Fluorine Sourcesupporting
confidence: 76%
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“…The films had a Li:Al ratio of 2.7:1, as determined with ICP-MS and carbon, silicon and oxygen impurities were below the XPS detection limit. The films had an ionic conductivity of 7.5 × 10 −6 S/cm at room temperature [146], which is similar to the first reports from the literature on thermally evaporated amorphous Li 3 AlF 6 films [12,13]. Interestingly, changing the pulsing ratio to three subcycles of AlF 3 and one LiF resulted in the same metal ratio in the as-deposited film as the pulsing ratio of 1:1, suggesting a similar conversion reaction as we have seen in our experiments on LiF [151] and Li 3 AlF 6 [139].…”
Section: Ald Of Metal Fluorides Using Hf As the Fluorine Sourcesupporting
confidence: 76%
“…These materials have been deposited by thermal evaporation and fast quenching, resulting in amorphous thin films. The increased ionic conductivity in these mixtures is attributed to the formation of amorphous intermediate phases with high coordination numbers for lithium, such as in the Li3AlF6 phase [13]. Even more complicated fluoride mixtures have been studied as well [12,14,[54][55][56], such as the LiF-AlF3-ScF3 system, which can reach similar conductivity values as the pure Li3AlF6 [12].…”
Section: Solid Electrolyte Materialsmentioning
confidence: 95%
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