Ion–photon emission during ion bombardment of beryllium surface

Photon emission from clean and oxygenated Si and SiO2 surfaces bombarded by 5keV krypton ions

“…It is established that fast ion bombardment also leads to the emission of electromagnetic radiation from sputtered neutral atoms and ions in excited states. The optical spectra mostly consist of a series of sharp lines, though in some cases superimposed on a broad continuum of radiation arising partly from polyatomic species [4][5][6]. The line spectrum is mainly due to the decay of excited atoms ejected from the target surface.…”