1973
DOI: 10.1103/physrevlett.30.614
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Ion Neutralization Processes at Insulator Surfaces and Consequent Impurity Migration Effects in SiO2Films

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Cited by 117 publications
(22 citation statements)
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“…Typical gases used in plasma treatments are O 2 and O 2 /He mixtures, Ar, and NF 3 /He mixtures. Plasma treatments are based on attack from the ions in the plasma, which causes alkali to migrate at the surface [24][25][26][27]. ''When an ion approaches a glass surface, electron transfer occurs from the surface, neutralizes the ion and creates a positive surface layer on the glass'' [28].…”
Section: The Effects Of Plasma Treatments On Glassesmentioning
confidence: 99%
“…Typical gases used in plasma treatments are O 2 and O 2 /He mixtures, Ar, and NF 3 /He mixtures. Plasma treatments are based on attack from the ions in the plasma, which causes alkali to migrate at the surface [24][25][26][27]. ''When an ion approaches a glass surface, electron transfer occurs from the surface, neutralizes the ion and creates a positive surface layer on the glass'' [28].…”
Section: The Effects Of Plasma Treatments On Glassesmentioning
confidence: 99%
“…Possible combination of kinetic and recombination energies therefore amounts to some 20-25 eV in maximum. Ar ion recombination on silicon surface has been shown by an elegant experiment to release Na-ions bound to the surface [46]. Na-ions are found thereafter to diffuse into the bulk of the crystal.…”
mentioning
confidence: 99%
“…In practical calculations, the estimated E i Ј(s m ) for Ne and Xe ions are 20.36 and 11.33 eV, respectively. 12,16 The widths of the F and F ϩ bands are assumed to be 0.3 eV. For Ne ions, the difference in calculated ␥ values between MgO-A -F is small, as shown in Table III.…”
Section: Discussionmentioning
confidence: 99%