Ion Implantation Damage Recovery in GeSn Thin Films

Li, Shangda; Liu, Shang; Stanchu, Hryhorii; Abernathy, Grey; Li, Baohua; Yu, Shui-Qing; Wang, Xiaoxin; Liu, Jifeng

doi:10.1109/jstqe.2024.3457154

IEEE J. Select. Topics Quantum Electron.

2025

DOI: 10.1109/jstqe.2024.3457154

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Ion Implantation Damage Recovery in GeSn Thin Films

Shangda Li,

Shang Liu,

Hryhorii Stanchu

et al.

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Ion Implantation Damage Recovery in GeSn Thin Films

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References 52 publications

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