Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Meškinis, Šarūnas; Kopustinskas, V.; Šlapikas, K.; Tamulevičius, Sigitas; Guobienė, Asta; Gudaitis, Rimantas; Grigaliūnas, V.

doi:10.1016/j.tsf.2005.12.223

Cited by 39 publications

(16 citation statements)

References 23 publications

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“…[9] Subsequently, the same group of researchers carried out a study on the ion beam synthesis of undoped and doped hydrogenated DLC films for nanoimprint lithography applications. [10] Most recently, Zhou et al reported the improved properties of nitrogen-doped DLC films in relation to carbon films discussing the potential of these materials for optical, electrical and mechanical applications. [11] The effect of nitrogen incorporation on the electrical conductivity of amorphous carbon has been explained by two different mechanisms: electronic doping and band-gap reduction caused by the DLC graphitization.…”

Section: Introductionmentioning

confidence: 99%

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Leal

Fraga

Rasia³

et al. 2016

Surf. Interface Anal.

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a Because of their outstanding characteristics, diamond-like carbon (DLC) thin films have been recognized as interesting materials for a variety of applications. For this reason, the effects of the incorporation of different elements on their fundamental properties have been the focus of many studies. In this work, nitrogen-incorporated DLC films were deposited on Si (100) substrates by DC magnetron sputtering of a graphite target under a variable N 2 gas flow rate in CH 4 + N 2 + Ar gas mixtures. The influence of high N 2 flow ratios (20, 40 and 60%) on the chemical, structural and morphological properties of N-DLC films was investigated. Different techniques including field emission gun-equipped scanning electron microscope (FEG-SEM), energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), profilometry, Rutherford backscattering spectrometry (RBS) and Raman spectroscopy (325-nm and 514-nm excitation) were used to examine the properties of the N-DLC films. Thus, the incorporation of nitrogen was correlated with the morphology, roughness, thickness, structure and chemical bonding of the films. Overall, the results obtained indicate that the fundamental properties of N-DLC films are not only related to the nitrogen content in the film but also to the type of chemical bonds formed.

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Section: Introductionmentioning

confidence: 99%

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Leal

Fraga

Rasia³

et al. 2016

Surf. Interface Anal.

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“…It should be acknowledged, though, that the thickness of DLC films is limited due to their adhesive properties [39].…”

Section: Influence Of Protective Layer To the Scattering Dose In Simentioning

confidence: 99%

Modelling of low energy X-ray scattering in radiation detectors with protective coatings

Cibulskaitė¹

2008

Lithuanian J. Phys.

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The results of Monte Carlo modelling of the low energy X-ray photon interaction processes in Si detector coated by different materials of different thickness are presented in this paper. Detector constructions containing free standing polymer-like carbon coatings and diamond-like carbon (DLC) coatings deposited onto detector surface were investigated. Total and scatter doses in coated samples were calculated and the influence of the coating material, composition, and thickness on the X-ray photon scattering processes in Si detector was evaluated. Evaluation of the detector construction with protective coating corresponding to the lowest fraction of scattered photons as compared to the calculated total dose is discussed in the paper. It is shown that nano-thick DLC coatings directly deposited onto detector surface are promising materials in the construction of radiation detectors due to their suitable mechanical properties, resistance against chemicals and against radiation damage of DLC films.

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“…SiO x containing a-C:H films are characterized through reduced stress, as compared to undoped a-C:H films, radiation hardness, low wear, good adhesion, thermal stability [1][2][3] and are very promising as protective optical coatings. Adding of the small amount of nitrogen to the total gas flow is enough to increase optical transmittance of SiO x doped DLC films in the range of the wave length shorter than 450 nm (range corresponding to the highest UV absorption of the UV resists) [4]. Another possibility to modify DLC film properties is additional energy transfer to the target by laser [5] or X-ray photon irradiation.…”

Section: /Spmentioning

confidence: 99%

“…Promising features of modified amorphous DLC structures deposited at 240eV could be used producing anti-sticking layers for UV imprint lithography applications as it was proposed in [4].…”

Section: /Spmentioning

confidence: 99%

Optical properties of diamond‐like carbon films irradiated by X‐ray photons

Laurikaitienė

Adlienė

Meškinis

et al. 2008

Phys. Status Solidi (c)

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Amorphous diamond like carbon (DLC) films deposited at room temperature on quartz glass wafer by means of direct ion beam deposition method from acetylene gas or hexamethyldisiloxane (HMDSO) vapour mixture with hydrogen and nitrogen gas were irradiated by high energy X‐ray photon and the optical properties of irradiated DLC films were investigated. Ionizing radiation induced modification of optical properties of the DLC films of different type were studied using UV–VIS spectrometry, laser ellipsometry, Raman and IR spectroscopy, and interpreted on the basis of the obtained results. It was found, that the irradiation of amorphous hydrogenated DLC films introduced significant changes in the investigated structures; however the properties of SiOx containing DLC films remained almost stable after their exposure with high energy X‐ray photons. The influence of film deposition conditions and co‐doping on the optical properties of irradiated DLC films and the role of hydrogen in the films are discussed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Cited by 39 publications

References 23 publications

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Modelling of low energy X-ray scattering in radiation detectors with protective coatings

Optical properties of diamond‐like carbon films irradiated by X‐ray photons

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Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Cited by 39 publications

References 23 publications

Impact of high N2flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N2flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Modelling of low energy X-ray scattering in radiation detectors with protective coatings

Optical properties of diamond‐like carbon films irradiated by X‐ray photons

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Product

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Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films