Ion beam modification of TiO2 films prepared by Cat-CVD for solar cell

CVD Production of Doped Titanium Dioxide Thin Films

“…PECVD techniques have been especially useful for preparing doped TiO 2 materials for applications in both gas sensors and in fuel cells 129, 130. A TiO 2 layer above the TCOs on a solar cell is known to increase the open circuit voltage 130. It has been found that N‐doping the material aids this by providing better optical matching in the solar cell than that experienced with pure TiO 2 131…”

“…Refractive index measurements showed an increase (from 2.1 to 2.4) with irradiation time. Nitrogen bombardment was also seen to aid the electrical conductivity,130 indicating that direct Ti‐N bonds (substitutional doping) were formed. Oxygen vacancies were also observed.…”

“…Nitrogen‐doped thin films were prepared by nitrogen ion bombardment of TiO 2 thin films originally made using catalytic CVD 130. These films of 1.1 µm thickness were deposited onto tantalum sheets using titanium tetraisopropoxide at 500 °C.…”

Modified multistep electrophoretic deposition of TiO2 nanoparticles to prepare high quality thin films for dye-sensitized solar cell

“…Therefore, improvements in the structure of the oxide can enhance the DSSCs efficiency via increase of the electron diffusion, the dye loading on the oxide and the light harvesting in the mesoporous layer, or decrease the recombination reaction [12][13][14][15]. So far, several methods have been used to prepare mesoporous TiO 2 layers: sol-gel [16], doctor blade or screen-printing [17], electrostatic spraying [18], chemical vapor deposition (CVD) [19,20], and electrophoretic deposition (EPD) [21,22].…”

Oxygen ion-beam irradiation of TiO2 films reduces oxygen vacancies and improves performance of dye-sensitized solar cells

“…7 Ion beam treatments are quite effective in modifying the surface properties of materials and have been applied to the surface modification of thin films because the ion fluence and ion energy can be varied independently and used to tailor the chemical and physical properties of the film. 8,9 In this study, we report the effect of ion beam irradiation on TiO 2 and on the photoconversion efficiencies of DSSCs. To decrease the oxygen vacancies and to reduce the electron recombination reactions between the injected conduction band electrons of TiO 2 and I 3 À ions in the electrolyte, TiO 2 films were irradiated with an oxygen ion beam of 500 and 1000 eV beam energy.…”