“…Recent experiments shows ion beam mixing at Fe/Si bilayers with Ar 8+ ions produced amorphous FeSi 2 layers [400,227], while Ar 1+ ion irradiations led to polycrystalline β-FeSi 2 [74] and a higher mixing rate achieved for Ar 8+ ion irradiations in the Fe/Si system, as compared to Ar 1+ ions [401,402]. Moreover, the influence of IBM with inert ions on the structure, magnetic, magneto-optical, and optical properties of Fe/Si multilayered films (MLF's) is investigated [403,404] and found that the IBM results in a formation of metastable B2-phase Fe 2 Si with a perfect crystalline structure, a low coercivity and a Curie temperature of about 550 K. It was found that annealing at 720 K of the ion beam mixed Fe-Si MLF further destroys the layered structure at the bottom and also decomposes Fe 2 Si to form a metastable magnetically hard Fe 5 Si 3 phase and, presumably, Fe 3 Si.…”