Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)

Rost, Martin; Erler, H.-J.; Giegengack, H.; Fiedler, O.; Weißmantel, C.

doi:10.1016/0040-6090(74)90052-2

Cited by 25 publications

(3 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Research about organic thin film prepared by the sputtering with a PTFE target had been started from 1960s. 6) Many research groups reported on the chemical structures of the sputtered PTFE thin films, [7][8][9][10][11][12][13][14] and their functional characteristics, e.g., super hydrophobic coatings, 15,16) low k coatings 17,18) and low friction coatings. 6,19) In addition, the sputtered PTFE thin film coated onto a quartz crystal have been employed for detection layers of volatile organic compounds (VOCs) sensor 20) and active oxygen sensor.…”

Section: Introductionmentioning

confidence: 99%

Optical characteristics of poly(tetrafluoroethylene) thin film prepared by a vacuum evaporation

Ohnishi

Kita

Tsuchiya

et al. 2016

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Poly(tetrafluoroethylene) (PTFE) thin films were deposited onto a glass slide substrate by a heat-resistance type vacuum evaporation apparatus due to changing the evaporation conditions. Transparency of the PTFE thin films prepared by the vacuum evaporation depended on the deposition conditions, i.e., temperatures of the basket, and distance between the evaporation source and substrate. To elucidate relationship between the molecular structure and transparency of the PTFE thin film prepared by the vacuum evaporation, chemical structures, crystallinity and thermophysical property were investigated. The chemical bonding state of the PTFE thin film prepared by the vacuum evaporation was almost the same as that of the pristine PTFE, however, the crystalinity was different. Although the pristine PTFE was crystal structure, the transparent evaporated thin film was estimated to be microcrystal structure. In addition, endothermic peaks in a differential scanning calorimeter (DSC) spectrum of the PTFE thin film were different from that of the pristine PTFE. These endothermic peaks of the PTFE thin film prepared by the vacuum evaporation shifted lower temperature compared to the pristine PTFE, which suggests that molecular weight of the PTFE thin film prepared by the vacuum evaporation decreased compared with that of the pristine PTFE.

show abstract

Section: Introductionmentioning

confidence: 99%

Optical characteristics of poly(tetrafluoroethylene) thin film prepared by a vacuum evaporation

Ohnishi

Kita

Tsuchiya

et al. 2016

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Only a few organic materials are known that can be sputtered. It is knows since the late 1960s that polytetraflourethylene (PTFE) can be sputtered [1,2] The polytetraflourethylene (PTFE) layers were deposited with the same rf magnetron sputtering setup, but in pure argon atmosphere at pressures of 3·10 -2 mbar with a rf sputtering power of 300 W. Polyethylene (PE) and melamine layers were evaporated with an evaporation source with quartz crucible. Rate and thickness were controlled by a quartz deposition controller.…”

Section: Introductionmentioning

confidence: 99%

Organic materials for the use in optical layer systems

et al. 2011

View full text Add to dashboard Cite

Ceramic materials such as SiO₂ or Ta₂O₅ are widely used for optical interference coatings. These materials have a high hardness and mostly offer excellent optical properties. However, there is a growing demand not only for good optical properties and a high stability, but also for coatings with a high elasticity. Especially coatings on polymer substrates need layers with improved elasticity since cracks in the layers occur easily when the coated substrates were mechanically deformed. For such applications flexible layer materials using organics or even polymers are very promising. These may be used as pure organic layers of with organic-inorganic composites. Unfortunately the chemical reactions to form polymers layers are more complex than the reactions to form oxides. Thus the deposition techniques for polymer layers are much more varying. Other important issues are the deposition rate stability and the optical properties of the polymer layers like haze, refractive and absorption index. In this paper we compare different ways for the deposition of organic and polymer layers in the gas phase at low pressures. The methods used were: evaporation, sputtering, PECVD and thermal CVD techniques. The optical parameters (refractive index, absorption and haze) and some mechanical parameters (adhesion, crack onset strain) of the different polymer layers were characterized. It will be shown that excellent organic film properties can be obtained by the use of a suitable organic material and deposition process. Also shown will be results on composite materials to modify the optical properties

show abstract

“…Many researchers have reported on the properties of fluorocarbon thin films prepared by RF sputtering or RF magnetron sputtering with a PTFE target. [1][2][3][4][5][6][7][8][9][10][11] As examples, the surface morphologies and chemical structures of these fluorocarbon thin films have been reported. In addition, the mechanical and tribological properties of these fluorocarbon thin films have also been reported.…”

Section: Introductionmentioning

confidence: 99%

Gas Adsorption Properties of Fluorocarbon Thin Films Prepared Using Three Different Types of RF Magnetron Sputtering Systems

Iwamori

Hasegawa

Yano

et al. 2010

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Fluorocarbon thin films were deposited onto a quartz crystal with a poly(tetrafluoroethylene) target using three different types of RF magnetron sputtering systems with strong, weak, and unbalanced magnetic fields. The adsorption properties of these thin films for water, ethanol, acetone, acetaldehyde, toluene, and methyl salicylate were evaluated using the quartz crystal microbalance (QCM) method in order to characterize the surface properties of these thin films. These thin films have low sensitivities to non-polar solvents that contain methyl and aromatic groups, and high sensitivities to polar solvents that contain carbonyl and hydroxyl groups. Chemical structures, especially, polar moieties in these fluorocarbon thin films would affect the gas adsorption properties.

show abstract

Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)

Cited by 25 publications

References 3 publications

Optical characteristics of poly(tetrafluoroethylene) thin film prepared by a vacuum evaporation

Optical characteristics of poly(tetrafluoroethylene) thin film prepared by a vacuum evaporation

Organic materials for the use in optical layer systems

Gas Adsorption Properties of Fluorocarbon Thin Films Prepared Using Three Different Types of RF Magnetron Sputtering Systems

Contact Info

Product

Resources

About