Ion beam etched diffraction gratings in fused quartz and lithium niobate

Yang, Jing; Wang, Ke‐Ming; Wang, Xuelin; Wang, Lei; Jia, Chuan-Lei; Jiang, Yi; Zhang, Jianhua; Lu, Fei

doi:10.1016/j.surfcoat.2006.07.161

Cited by 3 publications

(1 citation statement)

References 14 publications

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“…The commonly used physical processing method is the ion beam etching The commonly used physical processing method is the ion beam etching method, which employs high-energy ions to bombard the surface of the optical element. However, this process can reduce the service life of the optical element [21,22]. The chemical processing method currently used involves etching the sample with HF.…”

Section: Introductionmentioning

confidence: 99%

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Li,

Zhang,

Shi

et al. 2023

Coatings

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In high-power laser systems, the loading capacity of fused silica components under 351 nm irradiation is an important factor limiting their ability to increase output power, and in the current study, the damage threshold enhancement of fused silica components after RIE and AMP treatments has been investigated. Sub-surface defects in fused silica components after RIE treatment have also been investigated, but the reason for the high damage threshold could never be explained. Since quartz crystals and fused silica belong to the same silica system, and quartz crystals have more characterisation means than fused silica, we can extrapolate to fused silica by studying quartz crystals. We can extrapolate to fused silica by studying quartz crystals, which are characterised by more means than fused silica, and prove that the extrapolation is correct by characterising fused silica. In this study, the relationship between the etching process and the damage threshold is concluded by studying different RIE etching processes, and the damage threshold of the samples is optimal when the etching depth is 1 um.

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Section: Introductionmentioning

confidence: 99%

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Li,

Zhang,

Shi

et al. 2023

Coatings

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Nonlinear Lithium Niobate Metasurfaces for Second Harmonic Generation

Xie

Chen

et al. 2021

Laser & Photonics Reviews

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Second harmonic generation (SHG) is a coherent nonlinear phenomenon that plays an important role in laser color conversion. Lithium niobate (LN), which features both a large band gap and outstanding second‐order nonlinearities, acts as an important optical material for nonlinear frequency conversion covering a wide spectral range from ultraviolet to mid‐infrared. Here, LN metasurfaces with controllable SHG properties are experimentally demonstrated. Distinct enhancements for the SHG efficiency are observed at Mie‐resonances. And by changing the geometric parameters, thus the resonances of the metasurfaces, the authors manage to selectively boost the SHG efficiency at different wavelengths. The results would pave a way for developing with high flexibility the novel compact nonlinear light sources for applications such as biosensing and optical communications.

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Photonic guiding structures in lithium niobate crystals produced by energetic ion beams

Chen

2009

Journal of Applied Physics

191

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A range of ion beam techniques have been used to fabricate a variety of photonic guiding structures in the well-known lithium niobate (LiNbO3 or LN) crystals that are of great importance in integrated photonics/optics. This paper reviews the up-to-date research progress of ion-beam-processed LiNbO3 photonic structures and reports on their fabrication, characterization, and applications. Ion beams are being used with this material in a wide range of techniques, as exemplified by the following examples. Ion beam milling/etching can remove the selected surface regions of LiNbO3 crystals via the sputtering effects. Ion implantation and swift ion irradiation can form optical waveguide structures by modifying the surface refractive indices of the LiNbO3 wafers. Crystal ion slicing has been used to obtain bulk-quality LiNbO3 single-crystalline thin films or membranes by exfoliating the implanted layer from the original substrate. Focused ion beams can either generate small structures of micron or submicron dimensions, to realize photonic bandgap crystals in LiNbO3, or directly write surface waveguides or other guiding devices in the crystal. Ion beam-enhanced etching has been extensively applied for micro- or nanostructuring of LiNbO3 surfaces. Methods developed to fabricate a range of photonic guiding structures in LiNbO3 are introduced. Modifications of LiNbO3 through the use of various energetic ion beams, including changes in refractive index and properties related to the photonic guiding structures as well as to the materials (i.e., electro-optic, nonlinear optic, luminescent, and photorefractive features), are overviewed in detail. The application of these LiNbO3 photonic guiding structures in both micro- and nanophotonics are briefly summarized.

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Ion beam etched diffraction gratings in fused quartz and lithium niobate

Cited by 3 publications

References 14 publications

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Nonlinear Lithium Niobate Metasurfaces for Second Harmonic Generation

Photonic guiding structures in lithium niobate crystals produced by energetic ion beams

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