Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate

Lunin, L. S.; Девицкий, Олег Васильевич; Sysoev, I. A.; Pashchenko, A. S.; Kasyanov, I. V.; Nikulin, Dmitry A.; Irkha, V. A.

doi:10.1134/s106378501912023x

Cited by 2 publications

(1 citation statement)

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“…Current state-of-the-art concerns application of the 6.9 kW NEXT-C in NASA's double asteroid redirection test through spacecraft impact-induced deflection of the minor-planet moon Dimorphos [7]. Aside, ion beams have found general use in a diverse array of applications-ranging from etching and ultraprecision machining (encompassing semiconductor manufacturing) [8][9][10][11][12] to focused deposition [13], scanning electron microscopes [14], helium ion microscopes [15], radiobiology [16], and particle therapy [17].…”

Section: Introductionmentioning

confidence: 99%

The application of coherent microwave scattering and multiphoton ionization for diagnostics of electric propulsion systems

Patel

Karunarathne

Nicholas

et al. 2023

J. Phys. D: Appl. Phys.

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Nonintrusive measurements of plasma properties are essential to evaluate, and numerically simulate, the in-flight performance of electric propulsion systems. As a logical first step in the development of new diagnostic techniques, this work depicts the implementation of multiphoton ionization and coherent microwave scattering (MPI-CMS) in a gridded-ion accelerator operating on rare gases. Presented studies primarily comprise photoionization spectroscopy of ground & excited state-populations of both neutrals and ions – supplemented by optical emission spectroscopy and Langmuir probe derived plume properties. Results suggest the potential of MPI-CMS for non-intrusive measurements of specie number densities.

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