Ion beam deposited protective films

Abstract

Single or dual ion beam sources were used to deposit thin films'for three different applications. Metal and metal oxide films were evaluated as protective coatings for die materials. Film adher ence was measured and the most promising films were then tested under environments similar to operating conditions. It was shown that some materials do protect die material (H-13 steel) and do reduce thermal fatigue. Diamondlike films have many useful applications. A series of exper iments were conducted to define and optimize new approaches t o the manufacture of such films.A dual bdam system using argon and methane gases was developed to generate these films. The results of initial measurements which determine the quality of the films are reported. The fiber* glass beam shield incorporated in the 8-cm diameter mercury ion thruster to be used aboard a space flight experiment was coated with molybdenum to insure proper electrical and thermal properties. During the evolution of these programs, deposition parameters and fixturing tech niques were developed and are also presented. Single or dual ion beam sources were used to deposit thin films for three different applica tions. Metal and metal oxide films were evaluated as protective coatings for die materials. Film ,adherence was measured and the most promising films were then tested under environments similar to operating conditions. It was shown that some materials do protect die material (H-13 steel) and do reduce thermal fatigue. Diamondlike films have many useful applications. A series of experiments were conducted to define and optimize new -pproaches to the manufacture of such films. A dual beam system using argon and methane gases was developed to generate these films. The results of initial measurements which determine the quality of the films are reported. The fiber glass beam shield incorporated in the 8-cm diameter mercury ion thruster to be used aboard a space flight experiment was coated with molybdenum to insure proper electrical and thermal properties. During the evolution of these programs, deposition parameters and fixturing techniques were developed and are also presented,

Ion beam treatment of potential space materials at the NASA Lewis Research Center

“…For these experiments, the total beam energy was the sum of the discharge and screen grid voltages, and was maintained about 100 V. The current densities for these "depositions wasgenemllyabout 1 mAlcm 2 at a distance of2.5 cm axially downstream of the grids (ref. 18). Under these conditions films were deposited at a rate of 71A1min on.Si and Si0 2 to thicknesses of 1.5 ~m.…”