2002
DOI: 10.1016/s0921-4534(02)00892-4
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Ion-beam-assisted texturing of YSZ layers

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Cited by 18 publications
(8 citation statements)
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“…Detailed transmission electron microscopy (TEM) and x-ray diffraction studies of IBAD-YSZ growth found that the films evolved from an initial layer with a (110) fiber texture. 58 The Ar bombardment causes the film stress to continually increase up to a thickness of ϳ50 nm, at which point a transition layer of mixed (110)-oriented and (100)-oriented grains begins to grow and the film stress is reduced. Orientationdependent sputtering causes the (100) grains to have weak azimuthal alignment …”
Section: Biaxially Textured Ibad-mgo Templates For Ybco-coated Conducmentioning
confidence: 99%
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“…Detailed transmission electron microscopy (TEM) and x-ray diffraction studies of IBAD-YSZ growth found that the films evolved from an initial layer with a (110) fiber texture. 58 The Ar bombardment causes the film stress to continually increase up to a thickness of ϳ50 nm, at which point a transition layer of mixed (110)-oriented and (100)-oriented grains begins to grow and the film stress is reduced. Orientationdependent sputtering causes the (100) grains to have weak azimuthal alignment …”
Section: Biaxially Textured Ibad-mgo Templates For Ybco-coated Conducmentioning
confidence: 99%
“…82,83 Several years of development were needed before the first short-sample I c Х 100 A/cmwidth results could be repeated for meterlength coated conductors. [84][85][86] In addition to the IBAD deposition parameters discussed earlier, gun divergence for the large-area sources had to be minimized. For experiments with small-area ion sources, this was easily done, in that good collimation was readily achieved by maximizing source-to-substrate distances.…”
Section: Mrs Bulletin/august 2004 547mentioning
confidence: 99%
“…welches die Anisotropie der Eindringtiefe im Festkörper beschreibt [Behrisch 1983]. In , Yu et al 1986, Bradley et al 1986, Iijima et al 1993, Wiesmann 1998, Dzick et al 2002. Zusammenfassend kann gesagt werden, dass eine anisotrope Defektbildung, wie sie in YSZ und MgO beobachtet [Kautschor 2002, Kung et al 2001 und von verschiedenen Autoren erklärt wurde [Ressler et al 1997, Dong und Srolovitz 1999, Dong et al 2001, Zepeda-Ruiz und Srolovitz 2002, Carter 2000 wird [Iijima et al 1991], CeO 2 [Zhu et al 1994, Wiesmann et al 1995, Gnanarajan et al 1997, Gnanarajan und Savvides 1999, Wiesmann 1998], CeO 2 mit 10 at% Gd 2 O 3 [Wiesmann 1998] und Pr 6 O 11 [Betz et al 1997 [Arendt et al 2002], außerdem erhält man bereits in sehr dünnen Schichten eine ausgezeichnete Textur, die dann allerdings oberhalb von etwa 10 nm degradiert [Wang et al 1997].…”
Section: Mechanismen Der Texturentwicklungunclassified
“…Die mittels TEM untersuchten mikroskopischen Mechanismen, die zur Texturausbildung führen, scheinen aber bezüglich eines versetzungsvermittelten Mechanismus vergleichbar zu sein [Kautschor 2002, Kung et al 2001 Channelingrichtungen. YSZ-Daten aus [Dzick, 2002], GZO-Daten aus [Thiele 2003] MgO-Daten aus [Wang et al 1997], Y 2 O 3 -Textur aus [Betz 1998]. Abtragsraten nicht signifikant verschieden sind [Ressler et al 1997, Thiele 2003 [Mao et al 1997, Iijima et al 1997], führen bei Dzick Einfallswinkel 35°< χ< 55° nur zu einer leichten Texturverschlechterung [Dzick 1996].…”
Section: Mechanismen Der Texturentwicklungunclassified
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