Ion beam assisted deposition of ZrO2 thin films

Neubeck, K.; Nitsche, Robert; Hahn, Horst; Alberts, L.; Wolf, Gerhard; Friz, Martin

doi:10.1016/0168-583x(95)00687-7

Cited by 8 publications

(4 citation statements)

References 14 publications

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“…No argon signals were even observed in the RBS spectra of as-deposited ZrO 2 films on grafoil (carbon) substrates. This is in contrast to the previously reported RBS measurements of ZrO 2 films made by IBAD [26] or the ion beam mixing process [25] with 10-150 keV Ar beam where the presence of argon can be easily found in their depth profile data.…”

Section: Resultscontrasting

confidence: 99%

“…Optimization of the ion bombardment conditions can also modulate the morphology, density, stress level, crystallinity and chemical composition of the as-produced films with excellent adhesion to the substrates. IBAD has been previously applied and studied for ZrO 2 film deposition [25,26] using argon ions in the kiloelectronvolt energy range which resulted apparently in non-stoichiometric opaque zirconia. We have also observed similar results in our laboratory when only Ar ions, especially with high energy ions and high current density, were used to fabricate ZrO 2 films.…”

Section: Introductionmentioning

confidence: 99%

“…We have also observed similar results in our laboratory when only Ar ions, especially with high energy ions and high current density, were used to fabricate ZrO 2 films. Furthermore, bombardment of material with kiloelectronvolt energy range ions often resulted in accumulation of projectiles such as argon [25,26] and even formation of nitrogen bubbles [27] or solid krypton [28].…”

Section: Introductionmentioning

confidence: 99%

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Thermal stability of nanostructurally stabilized zirconium oxide

Namavar¹,

Wang

Cheung

et al. 2007

Nanotechnology

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Nanostructurally stabilized zirconium oxide (NSZ) hard transparent films were produced without chemical stabilizers by the ion beam assisted deposition technique (IBAD). A transmission electron microscopy study of the samples produced below 150 °C revealed that these films are composed of zirconium oxide (ZrO2) nanocrystallites of diameters 7.5 ± 2.3 nm. X-ray and selected-area electron diffraction studies suggested that the as-deposited films are consistent with cubic phase ZrO2. Rutherford backscattering spectroscopy (RBS) indicated the formation of stoichiometric ZrO2. The phase identity of these optically transparent NSZ films was in agreement with cubic ZrO2, as indicated by the matching elastic modulus values from the calculated results for pure cubic zirconium oxide and results of nanoindentation measurements. Upon annealing in air for 1 h, these NSZ films were found to retain most of their room temperature deposited cubic phase x-ray diffraction signature up to 850 °C. Size effect and vacancy stabilization mechanisms and the IBAD technique are discussed to explain the present results.

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Section: Resultscontrasting

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Thermal stability of nanostructurally stabilized zirconium oxide

Namavar¹,

Wang

Cheung

et al. 2007

Nanotechnology

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“…The top Pt thin-film layer can be obtained by several methods, e.g. ion beam assisted deposition [8] and chemical vapour deposition [9,10]. In many applications paste Pt electrodes are used too [11,12].…”

Section: Introductionmentioning

confidence: 99%

Damage and thermal annealing of dual-ions (Pt and S) implanted YSZ material

Xie

Zhu

Cao

1997

J. Phys.: Condens. Matter

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A oriented cubic YSZ (yttria stabilized zirconia) single crystal implanted with 160 keV platinum ions and subsequently implanted with 40 keV sulphur ions has been investigated. The implantation was carried out at room temperature (RT). Annealing was performed isothermally in air ambient at and for 4 and 12 hours. Rutherford backscattering spectrometry and channelling (RBS-C) of 2 MeV He ions was used to study the depth distribution of lattice damage and impurity, as well as the recrystallization of the damaged layer. X-ray diffraction (XRD) is employed to examine the phase formation. For dual-implanted samples, XRD measurement showed, after annealing, formation of monoclinic phase polycrystalline in the damage region and Pt grains with randomly oriented cubic phase, which is consistent with RBS-C results. In addition, XRD measurement also revealed formation of hexagonal grains.

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Local Structure and Long Range Order

Winterer

2002

Nanocrystalline Ceramics

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Ion beam assisted deposition of ZrO2 thin films

Cited by 8 publications

References 14 publications

Thermal stability of nanostructurally stabilized zirconium oxide

Thermal stability of nanostructurally stabilized zirconium oxide

Damage and thermal annealing of dual-ions (Pt and S) implanted YSZ material

Local Structure and Long Range Order

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