Invited Review Nanoscale devices fabricated by dynamic ploughing with an atomic force microscope

Kunze, U.

doi:10.1006/spmi.2002.1022

Cited by 36 publications

(13 citation statements)

References 76 publications

(91 reference statements)

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“…Advancements in the nano-manufacturing research include nano-mechanical machining to make complex shapes by plowing techniques of semiconductor structures [16]. Molecular dynamics simulations of nanometric cutting mechanisms of amorphous alloys were investigated to study the effects of nano machining [17].…”

Section: Nano-machiningmentioning

confidence: 99%

Molecular dynamics simulations of single grain pure aluminum in a vice fixture for nanomanufacturing applications

Garcia

Zhang

Linke

et al. 2018

CIRP Journal of Manufacturing Science and Technology

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Although nano and macro manufacturing encompass two different scales of machining, investigating both is essential for understanding machining distortions and deformations. In both macro and nano fabrication, the fixture is the primary means of securing the workpiece in place while performing the manufacturing operations. Understanding the fixture design is a critical aspect relating the two different scales of manufacturing. This paper describes a method involving atomistic simulation for understanding machining distortions for the macro scale by investigation of nano machining and work holding devices. 2 This research aims to help bridge the knowledge gap in manufacturing of macro and nano scale applications. The simulations performed showed that the fixture influences the machining distortions and the critical stress concentrations on the workpiece.

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Section: Nano-machiningmentioning

confidence: 99%

Molecular dynamics simulations of single grain pure aluminum in a vice fixture for nanomanufacturing applications

Garcia

Zhang

Linke

et al. 2018

CIRP Journal of Manufacturing Science and Technology

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“…The AFM can be used to fabricate features for creating novel nano-scale electronics and structures (Wendel et al [1994]) as well as sensors (Davis et al [2000]). The fabrication techniques include voltage-induced oxidation (Campbell and Snow [1996]), dip-pen lithography (Piner et al [1999]), or physically indenting and scratching the surface (Kunze [2002]). Additionally, AFM can be used to manipulate particles (Decossas et al [2003]).…”

Section: The Fabrication Processmentioning

confidence: 99%

Hysteresis Inverse Iterative Learning Control of Piezoactuators in AFM

Ashley

Aridogan

Riddle

et al. 2008

IFAC Proceedings Volumes

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We consider the application of iterative learning control (ILC) in which the input update law exploits an inverse model of the hysteresis behavior for piezoactuators. Compared to ILC for hysteresis that updates the control input using the measured tracking error scaled by a constant (fixed) learning gain, the proposed ILC algorithm converges more rapidly. The approach is analyzed and experimental results are presented to demonstrate the method's ability for precision output tracking.

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“…Nowadays the AFM lithography has been tried out to fabricate nanofluid channels (Wang et al ., ; Hu et al ., ), nano sensors (Archanjo et al ., , ; Hong and Lin, ) and other NEMS devices. The potential applications of AFM electric nanolithography are bound to expand vastly in future with the rapid development of this machining technique (Depont et al ., ; Bo et al ., ; Kunze ; Hibbert et al ., ; Hu et al ., ).…”

Section: Introductionmentioning

confidence: 99%

“…Based on its machining principles, the AFM nanolithography can be categorized into the following two main types: one is the AFM mechanical machining and the other is the AFM electric lithography. The AFM mechanical machining is achieved by exerting the mechanical force into the substrates, which involves the common forms of the AFM force scratching (Kunze ; Santinacci et al ., ; Tseng et al ., ; Huang et al ., ), the AFM nano‐indentation (Wiesauer and Springholz, ), the AFM nano‐milling processes (Gozen and Ozdoganlar, ) and the AFM nano‐grafting and nano‐shaving (Xu et al ., ; Liu et al ., ). These mechanical AFM machining methods could be regarded as the nanoscale counterparts of the traditional mechanical machining techniques in the macro to micro scale.…”

Section: Introductionmentioning

confidence: 99%

Comparison of the bias voltage effect and the force effect during the nanoscale AFM electric lithography on the copper thin film surface

Yang

Jun

2015

Scanning

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As one of the tip-based nanoscale machining methods, AFM-based nanolithography has been proved to be capable of fabricating nanostructures and devices on a wide range of materials by means of mechanical force, bias voltage, chemical reaction, etc. In this paper, we have compared the influences of the bias voltage effect and the force effect during the nanoscale AFM electric lithography on the metallic copper film surface respectively through the bias voltage dominating scheme and the contact force dominating scheme. The geometric sizes of the line structures and the area patterns fabricated under the two schemes with different parameter settings were compared to obtain the machining characteristics and mechanisms of the two distinct effects separately. The ratios of debris amount to the total material removal amount under the two schemes were quantitatively evaluated. Furthermore, both the arbitrary line structure with high aspect ratio and the area pattern with small surface roughness were fabricated under the appropriate scheme and parameter settings. This study is of great help to effectively achieve the desired nanoscale patterns by AFM electric lithography for their promising applications in the fabrication of various MEMS or NEMS devices. SCANNING 38:412-420, 2016. © 2015 Wiley Periodicals, Inc.

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Invited Review Nanoscale devices fabricated by dynamic ploughing with an atomic force microscope

Cited by 36 publications

References 76 publications

Molecular dynamics simulations of single grain pure aluminum in a vice fixture for nanomanufacturing applications

Molecular dynamics simulations of single grain pure aluminum in a vice fixture for nanomanufacturing applications

Hysteresis Inverse Iterative Learning Control of Piezoactuators in AFM

Comparison of the bias voltage effect and the force effect during the nanoscale AFM electric lithography on the copper thin film surface

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