Abstract:Stable operations as resistive switching memory were demonstrated in amorphous TaO x (a-TaO x ) thin films with very flat surfaces by conductive atomic force microscopy (c-AFM). The a-TaO x thin films fabricated on glass and Nb-doped SrTiO 3 substrates by pulsed laser deposition showed high surface flatness with root-mean-square roughness of less than 0.2 nm. The c-AFM observations on the surfaces revealed that the resistive switching in a-TaO x causes almost no change in the topographic structures, and the si… Show more
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