Abstract:This paper describes the evidence of proton transport in atomic layer deposited yttria-stabilized zirconia (YSZ) and its application as chemical barrier layer for proton conduction oxides that are vulnerable to carbon dioxide attack. Secondary ion mass spectrometry measurement in atomic layer deposited YSZ showed that atomic layer deposited YSZ contains two orders of magnitude higher deuterium concentration than the pulsed laser deposited YSZ, which may be attributed to innate properties of atomic layer deposi… Show more
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