Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

Beechem, Thomas E.; Graham, Samuel; Kearney, Sean P.; Phinney, Leslie M.; Serrano, Justin Raymond

doi:10.1063/1.2738946

Cited by 147 publications

(116 citation statements)

References 24 publications

Supporting

Mentioning

109

Contrasting

Order By: Relevance

“…29 This linear behavior of Raman peak frequencies with temperature is seen in many materials within a certain temperature range. 22,23,29 In Table 1 (Table 1 and Supporting Information) and found no significant difference in the first-order temperature coefficients for either mode. The small difference between χ T coefficients for the E 2g 1 mode in suspended versus sapphire-supported likely results from varied in-plane strain applied by the substrate since E 2g 1 mode is prone to strain in MoS 2 while A 1g is not.…”

Section: Resultsmentioning

confidence: 90%

Thermal Conductivity of Monolayer Molybdenum Disulfide Obtained from Temperature-Dependent Raman Spectroscopy

et al. 2014

View full text Add to dashboard Cite

Atomically thin molybdenum disulfide (MoS2) offers potential for advanced devices and an alternative to graphene due to its unique electronic and optical properties. The temperature-dependent Raman spectra of exfoliated, monolayer MoS2 in the range of 100–320 K are reported and analyzed. The linear temperature coefficients of the in-plane E 2g 1 and the out-of-plane A 1g modes for both suspended and substrate-supported monolayer MoS2 are measured. These data, when combined with the first-order coefficients from laser power-dependent studies, enable the thermal conductivity to be extracted. The resulting thermal conductivity κ = (34.5 ± 4) W/mK at room temperature agrees well with the first-principles lattice dynamics simulations. However, this value is significantly lower than that of graphene. The results from this work provide important input for the design of MoS2-based devices where thermal management is critical.

show abstract

Section: Resultsmentioning

confidence: 90%

Thermal Conductivity of Monolayer Molybdenum Disulfide Obtained from Temperature-Dependent Raman Spectroscopy

et al. 2014

View full text Add to dashboard Cite

show abstract

“…These are scanning thermal microscopes (SThM) [5], dispersed or scanned individual nanoprobes [3,6], direct methods like micro-Raman spectroscopy [7] or near-field optical temperature measurements [8]. SThMs have temperature sensitive elements at a scanning tip (e.g.…”

mentioning

confidence: 99%

High-Precision Nanoscale Temperature Sensing Using Single Defects in Diamond

et al. 2013

View full text Add to dashboard Cite

Measuring local temperature with a spatial resolution on the order of a few nanometers has a wide range of applications from semiconductor industry over material to life sciences [1]. When combined with precision temperature measurement it promises to give excess to small temperature changes caused e.g. by chemical reactions or biochemical processes [2]. However, nanoscale temperature measurements and precision have excluded each other so far owing to the physical processes used for temperature measurement of limited stability of nanoscale probes [3]. Here we experimentally demonstrate a novel nanoscale temperature sensing technique based on single atomic defects in diamonds. Sensor sizes range from millimeter down to a few tens of nanometers. Utilizing the sensitivity of the optically accessible electron spin level structure to temperature changes [4] we achieve a temperature noise floor of 5 mK/ √ Hz for single defects in bulk sensors. Using doped nanodiamonds as sensors yields temperature measurement with 130 mK/ √ Hz noise floor and accuracies down to 1 mK at length scales of a few ten nanometers. The high sensitivity to temperature changes together with excellent spatial resolution combined with outstanding sensor stability allows for nanoscale precision temperature determination enough to measure chemical processes of few or single molecules by their reaction heat even in heterogeneous environments like cells.Several kinds of nanoscale temperature sensing techniques have been developed in the recent past [1]. These are scanning thermal microscopes (SThM) [5], dispersed or scanned individual nanoprobes [3,6], direct methods like micro-Raman spectroscopy [7] or near-field optical temperature measurements [8]. SThMs have temperature sensitive elements at a scanning tip (e.g. thermocouple), the nanoprobes have temperature dependent properties (e.g. fluorescence spectrum) which can be accessed without direct contact.In this study utilize a single quantum system in a solid state matrix as a temperature nanoprobe, namely the negatively charged nitrogen-vacancy (NV) center in diamond, which allows probe sizes down to ∼ 5 nm [9]. High fidelity control of its ground state electronic and nuclear spins has been demonstrated for various quantum information test experiments [10-15] as well as for nanometer scale metrology purposes [16][17][18][19] e.g. measuring small magnetic and electric fields. Here we show that it also allows tracking temperature with high precision. Temperature nanoprobes can be either dispersed in the specimen to be investigated or used in scanning probe geometry (see fig. 1a).The NV center is a molecular impurity in diamond comprising a substitutional nitrogen impurity and an adjacent carbon vacancy. Optical excitation in a wavelength range from 460 nm to 580 nm yields intense fluorescence emission [20]. Excitation also leads to a high degree of ground state electron spin polarization (S = 1, the actual sensor level) into its m S = 0 (|0 ) sublevel [21]. Furthermore the fluorescence decreases upo...

show abstract

“…Assuming that these uncertainties are uncorrelated yields an uncertainty for the peakwidth-based temperature measurement of ±8.79 K. This total uncertainty is slightly lower than previously reported by Beechem et al (2007), namely ~9 K rather than ~11 K, because of the increased number of acquisitions used and the increased signal level used.…”

Section: Experimentally Measured Temperature Profilesmentioning

confidence: 78%

“…Both metrics are practical for temperature mapping of MEMS. However, while peak width is sensitive only to surface temperature, peak position is sensitive to both stress and temperature (Kearney et al, 2006;Beechem et al, 2007).…”

Section: Experimentally Measured Temperature Profilesmentioning

confidence: 99%

Validation of thermal models for a prototypical MEMS thermal actuator.

Gallis¹,

Torczynski²,

Piekos³

et al. 2008

View full text Add to dashboard Cite

This report documents technical work performed to complete the ASC Level 2 Milestone 2841: validation of thermal models for a prototypical MEMS thermal actuator. This effort requires completion of the following task: the comparison between calculated and measured temperature profiles of a heated stationary microbeam in air. Such heated microbeams are prototypical structures in virtually all electrically driven microscale thermal actuators. This task is divided into four major subtasks. (1) Perform validation experiments on prototypical heated stationary microbeams in which material properties such as thermal conductivity and electrical resistivity are measured if not known and temperature profiles along the beams are measured as a function of electrical power and gas pressure. (2) Develop a noncontinuum gas-phase heat-transfer model for typical MEMS situations including effects such as temperature discontinuities at gas-solid interfaces across which heat is flowing, and incorporate this model into the ASC FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (3) Develop a noncontinuum solid-phase heat transfer model for typical MEMS situations including an effective thermal conductivity that depends on device geometry and grain size, and incorporate this model into the FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (4) Perform combined gas-solid heat-transfer simulations using Calore with these models for the experimentally investigated devices, and compare simulation and experimental temperature profiles to assess model accuracy. These subtasks have been completed successfully, thereby completing the milestone task. Model and experimental temperature profiles are found to be in reasonable agreement for all cases examined. Modest systematic differences appear to be related to uncertainties in the geometric dimensions of the test structures and in the thermal conductivity of the polycrystalline silicon test structures, as well as uncontrolled nonuniform changes in this quantity over time and during operation. 4 ACKNOWLEDGMENTSThe authors gratefully acknowledge the careful technical reviews of this report by Michael J. Shaw and Sean P. Kearney and the thorough programmatic reviews of this project by

show abstract

Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

Cited by 147 publications

References 24 publications

Thermal Conductivity of Monolayer Molybdenum Disulfide Obtained from Temperature-Dependent Raman Spectroscopy

Thermal Conductivity of Monolayer Molybdenum Disulfide Obtained from Temperature-Dependent Raman Spectroscopy

High-Precision Nanoscale Temperature Sensing Using Single Defects in Diamond

Validation of thermal models for a prototypical MEMS thermal actuator.

Contact Info

Product

Resources

About