Investigations on the removal mechanisms of diverse alumina based polishing slurries for chemical mechanical polishing of electro-plated NiFe 45/55

Rittinger, J.; Cvetković, Srecko; Rissing, Lutz

doi:10.1016/j.mee.2013.02.041

Cited by 1 publication

(1 citation statement)

References 17 publications

(14 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It is present in toothpaste, porcelain bathtubs, spark plugs, and tires, in the catalytic converters of cars, in the condensers and microchips of television sets, and in the paper of books and magazines . The application of alumina is being expanded to the area of catalysts, polishing materials, and bioceramics. − The Bayer process has been used for a long time to produce common-grade alumina. Special-grade aluminas of higher purity and controlled particle size distribution were produced by sol–gel processing. − The Bayer and the sol–gel processes involve a series of steps including filtration, washing, drying, and calcination.…”

Section: Introductionmentioning

confidence: 99%

Kinetics of Gas-Phase Hydrolysis of Aluminum Chloride for Alumina Particles

Park

Kim

2014

Ind. Eng. Chem. Res.

View full text Add to dashboard Cite

A kinetic study on the gas-phase hydrolysis of AlCl 3 was carried out in a 0.5 L batch reactor in the temperature range 150−210 °C with varying AlCl 3 and H 2 O concentrations. The concentrations of HCl produced from the hydrolysis were measured with time during the hydrolysis that lasted for 300 s. An overall rate equation involving four kinetic parameters was proposed:A, E, α, and β were determined to be 1.85 × 10 9 L 2.27 /mol 2.27 •s, 35.8 kJ/mol, 2.27, and 873.7 L/mol, respectively, by nonlinear regression to best fit measured HCl concentrations. The kinetics of the first elimination of chlorine was compared between experimental data and prediction based on transition state theory. The rate equation proposed in this study may be useful for the design and simulation of a reactor for producing alumina particles by gas-phase hydrolysis of aluminum chloride.

show abstract