Investigations on the effect of substrate temperature on the properties of reactively sputtered zirconium carbide thin films

Kumar, Sandeep; Sharma, Amit; Rao, G. Mohan; Suwas, Satyam

doi:10.1016/j.jallcom.2016.10.225

Cited by 23 publications

(8 citation statements)

References 30 publications

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“…The morphology of the coatings was affected by the number of focus shots. An improvement in the crystallinity of the Zr-nitride/carbonitride coatings was observed, which was attributed to the saturation of the residual stresses developed in all planes for higher numbers of focus shots (40)(41)(42)(43)(44)(45)(46)(47)(48)(49)(50), in turn caused by enhanced ion induced annealing of the substrate surface.…”

Section: Effect Of Deposition Methodsmentioning

confidence: 97%

“…The hardness and elastic modulus increased with temperature with a maximum of 24.8 GPa and 213 GPa, respectively, at 325 1C attributed to the decrease in grain size and the increase in sp 3 bonding compared to sp 2 bonding in ZrC as shown by an XPS study. 42 Nanocrystalline ZrC coatings with grain sizes from 6 to 20 nm were grown on Si(100) substrates at temperatures from 30 to 500 1C by the pulsed laser deposition technique. 45 The coatings were under compressive residual stress.…”

Section: Effect Of Substrate Temperaturementioning

confidence: 99%

See 1 more Smart Citation

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

Ul‐Hamid

2020

Mater. Adv.

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Section: Effect Of Deposition Methodsmentioning

confidence: 97%

Section: Effect Of Substrate Temperaturementioning

confidence: 99%

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

Ul‐Hamid

2020

Mater. Adv.

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“…To assess the characteristics of nanocomposite TiAlSiN coatings the full width at half maximum (FWHM) values of the peak (111) and the grain size were estimated by the Debye-Scherrer formula [26]. The grain sizes of Samples 1-4 are 15.6, 13.5, 15.2, and 12.7 nm respectively, suggesting that the role played by pre-treatment of PBII in the crystal lattice size of the deposited coatings is quite insignificant.…”

Section: Microstructure Of As-deposited Coatingsmentioning

confidence: 99%

Improved Adhesion of TiAlSiN Nanocomposite Coatings on Cemented Carbide Substrate by Pre-Implantation

Wang

et al. 2019

Coatings

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TiAlSiN coatings were deposited on YT 15 cemented carbide substrate by reactive direct current magnetron sputtering (DCMS) in a Plasma Immersion Ion Implantation and Deposition (PIII&D) system. The pre-implantation step and the coating deposition were carried out in the same experimental facility. In this article the effects of pre-implantation of several different elements (N, C, and O) were investigated. The adhesion strength, hardness, micro-structure, element concentration, depth profile, and the formation of coatings after the PIII experiments were characterized by a wide variety of techniques such as Rockwell indentation, scratch test, nano-indentation measurement, X-ray diffraction, energy dispersive spectroscopy, and Auger electron spectroscopy. The results showed that the adhesive strength of TiAlSiN coatings was significantly improved on samples pre-implanted with N and O whereas only slightly improved with pre-implantation of C. Additionally, the microstructure and mechanical properties of the TiAlSiN coatings were also altered through pre-implantation. The improved adhesion could be explained by the grain refinement and surface energy enhancement of the substrate by pre-implantation.

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“…The presented examples of applications of Zr-C-based coatings and the prospects for new applications of these coatings, resulting from the high potential of shaping their properties, inspire research work aimed at establishing the correlation between the nano/micro structure and properties of coatings [8][9][10][11][12][13][14]. Among other things, in this field, one of the research topics is the analysis of changes in the properties of the coatings along with the increase in the total carbon content in the coating resulting from the formation of carbon in amorphous form, surrounding nanocrystalline carbide grains [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Inter-Relationship between Coating Micro/Nanostructure and the Tribological Performance of Zr–C Gradient Coatings

et al. 2020

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The research presented in this article concerns Zr–C gradient coatings that were deposited on HS6-5-2 steel by reactive magnetron sputtering from the Zr target in appropriately programmed C2H2 mass flow rate, resulting in various profiles of atomic carbon concentrations in the coating and consequently in spatial change of the properties (H, E, …) and behavior (H/E, H3/E2, We). In particular, the characteristic changes in hardness and Young’s modulus in the Zr–C coatings represented approximately by the bell curve, which has a maximum at the content of about 50 at.% C, were an inspiration to study the behavior of gradient coatings with carbon content in the range of 0–50 and 50–85 at.% with the same hardness change profile. The obtained results indicate that, firstly, the gradient of spatial changes in the coating composition increases their resistance to cohesive damage in comparison to non-gradient coatings, and, secondly, the results show that high hardness is a desired property but not sufficient to ensure adequate coating performance. Independently, an appropriate nano/microstructural structure is necessary, which determines their tribological behavior. In particular, in the case of the tested Zr–C coatings, the obtained results indicate that gradient coatings with a carbon content in the range of 50–85 at.% have better properties, characterized by the critical force Lc2, wear, coefficient of friction, H/E and H3/E2 ratios.

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Investigations on the effect of substrate temperature on the properties of reactively sputtered zirconium carbide thin films

Cited by 23 publications

References 30 publications

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

Improved Adhesion of TiAlSiN Nanocomposite Coatings on Cemented Carbide Substrate by Pre-Implantation

Inter-Relationship between Coating Micro/Nanostructure and the Tribological Performance of Zr–C Gradient Coatings

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