Abstract:Zinc oxide thin films were prepared on the glass substrate by rf-magnetron sputtering technique and their structural, optical, and mechanical characteristics were then investigated. As the SEM images have revealed, the average grain size of ZMO thin film are influenced by pressure and sputter power, and the average value of the grain size is about 30~50 nm. The EDS analysis also revealed a successful doping of Mo in ZnO thin film. The transmittance property of ZMO thin film exhibited an excellent transparency … Show more
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