IrO 2 and Ta 2 O 5 mixed oxide coatings were deposited on Ti supports in order to fabricate dimensionally stable electrodes used in chloro-alkali technology. Secondary ion mass spectrometry (SIMS) and electrochemical experiments were carried out in order to characterize these materials. Electrochemical tests found the highest electrocatalytic activity for 50% IrO 2 -50% Ta 2 O 5 electrodes. SIMS analyses are in harmony with these results, and it is shown that IrO 2 is more diluted on the surface for noble metal oxide concentrations higher than 50%. Finally, it was observed by SIMS that support material migration was favoured at the highest concentrations of Ta 2 O 5 stabilizer.