Investigation on temperature stability of MEMS silicon‐based sixth‐order stripline filter

Abstract

A double-layer silicon-based stripline filter with a center frequency of 20.76 GHz and a bandwidth of 2 GHz was designed by using an aggressive space mapping (ASM) and fabricated with Microelectromechanical Systems (MEMS) technology. The measurements agreed well with simulation, showing efficiency and accuracy of the ASM algorithm. Over temperature range of À50 to 80 C, the filter's performance such as insertion loss, bandwidth and central frequency were investigated and discussed, and the measured frequency drift is À55.5 ppm/ C and the bandwidth variation is ±4% over temperature range of À50 to 80 C. At 150 C after 1000 h of aging test, although the insertion loss of the filter slightly increased from 2.18 to 2.4 dB and the passband ripple deteriorated, the stopband rejection performance improved.