Investigation on Properties of β-Ga₂O₃ Solid Films with Zno Nano-Interlayer

Abstract

High-quality β-Ga2O3 films andβ-Ga2O3 /ZnO/β-Ga2O3 nano composite thin films were fabricated on the sapphire substrates in the high vacuum atmosphere by laser molecular beam epitaxy (LMBE). The lattice structure and optical properties of these films were characterized.With the increase of the sputtering time of ZnO target ,Photoluminescence spectrums and Raman spectrums of the β-Ga2O3 /ZnO/β-Ga2O3 nano composite films were shifted regularly . When the ZnO target was sputtered 30min , the stronggest peak of Raman spectrum was appeared at 267nm . Besides,the composition ofβ-Ga2O3 /ZnO/β-Ga2O3 nano composite film was described .