Investigation on mechanical properties of sputtered TiNi thin films

Tong, Lizhu; Li, Y.H.; Meng, F.L.; Tian, Hongwei; Zheng, Weitao; Wang, Y.M.

doi:10.1016/j.jallcom.2010.01.085

Cited by 15 publications

(6 citation statements)

References 11 publications

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“…It is well-known that the Ti-rich Ni-Ti films have higher M s than the Ni-rich films [19]. Similarly, we also find existence of B19 0 phases in Ni-rich Ni-Ti alloys, it should be noted that all of them contain Ni 3 Ti precipitates [22,29]. In addition, the change of transformation path from B2-R-B19 0 to B2-B19 0 also indicates the increase of the matrix Ti content, due to the Ti-rich films show one-step phase transformation in general [14].…”

Section: Phase Transformation Analysissupporting

confidence: 81%

Multiple effects of Ni-rich precipitates in Ni–Ti–Al thin films

Shi¹,

Cao²,

Wei³

et al. 2015

Materials Science and Engineering: A

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Section: Phase Transformation Analysissupporting

confidence: 81%

Multiple effects of Ni-rich precipitates in Ni–Ti–Al thin films

Shi¹,

Cao²,

Wei³

et al. 2015

Materials Science and Engineering: A

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“…The values of hardness (7.8 ± 4 GPa) and modulus (83 ± 42 GPa) measured in this investigation are, however, much lower than those observed for TiN coatings of similar thicknesses deposited by unbalanced magnetron sputtering [48], where typical hardness and modulus values were 22.8 ± 3.4, and 276 ± 41 GPa, respectively. The values recorded here for the TiN film is closer to those of TiNi coatings which generally have values from 7.2 to 9.2 and 113 to 132 GPa, respectively [49]. Hence, the values of hardness and modulus measured are actually a combined one from the graded layer of TiN/TiNi film response.…”

Section: Thin-film Characterisationsupporting

confidence: 69%

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

Faisal

Prathuru

Goel

et al. 2017

Shap. Mem. Superelasticity

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The mechanisms of nanoscale fatigue of functionally graded TiN/TiNi films have been studied using multiple-loading cycle nanoindentation and nano-impact tests. The functionally graded films were sputter deposited onto silicon substrates, in which the TiNi film provides pseudo-elasticity and shape memory behaviour, while a top TiN surface layer provides tribological and anti-corrosion properties. Nanomechanical tests were performed to investigate the localised film performance and failure modes of the functionally graded film using both Berkovich and conical indenters with loads between 100 lN and 500 mN. The loading history was critical to define film failure modes (i.e. backward depth deviation) and the pseudo-elastic/shape memory effect of the functionally graded layer. The results were sensitive to the applied load, loading mode (e.g. semi-static, dynamic) and probe geometry. Based on indentation force-depth profiles, depth-time data and post-test surface observations of films, it was concluded that the shape of the indenter is critical to induce localised indentation stress and film failure, and generation of pseudo-elasticity at a lower load range. Finite-element simulation of the elastic loading process indicated that the location of subsurface maximum stress near the interface influences the backward depth deviation type of film failure.

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“…In particular, the addition of a small amount of Y 2 O 3 nanoparticles (0.1~0.5 wt.%) in the alloy matrix can not only improve its mechanical properties, but also annihilate the defects effectively caused by irradiation [16][17][18][19]. Moreover, the grain refinement of structural materials is also treated as one of the effective methods of optimizing the strength and irradiation resistance properties, owing to the high density of interface, especially in nanocrystalline materials, as reported in nanocrystalline Au (grain size~23 nm) [20] and TiNi alloys (grain size 23-31 nm) [21]. This is because the high-density interface in nanocrystalline materials can effectively absorb and annihilate the irradiation defects, which shows a better anti-irradiation performance than that of coarse grain materials.…”

Section: Introductionmentioning

confidence: 99%

Effect of Nano-Y2O3 Content on Microstructure and Mechanical Properties of Fe18Cr Films Fabricated by RF Magnetron Sputtering

et al. 2021

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In this work, FeCr-based films with different Y2O3 contents were fabricated using radio frequency (RF) magnetron sputtering. The effects of Y2O3 content on their microstructure and mechanical properties were investigated through scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), inductive coupled plasma emission spectrometer (ICP) and a nanoindenter. It was found that the Y2O3-doped FeCr films exhibited a nanocomposite structure with nanosized Y2O3 particles uniformly distributed into a FeCr matrix. With the increase of Y2O3 content from 0 to 1.97 wt.%, the average grain size of the FeCr films decreased from 12.65 nm to 7.34 nm, demonstrating a grain refining effect of Y2O3. Furthermore, the hardness of the Y2O3-doped FeCr films showed an increasing trend with Y2O3 concentration, owing to the synergetic effect of dispersion strengthening and grain refinement strengthening. This work provides a beneficial guidance on the development and research of composite materials of nanocrystalline metal with a rare earth oxide dispersion phase.

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Investigation on mechanical properties of sputtered TiNi thin films

Cited by 15 publications

References 11 publications

Multiple effects of Ni-rich precipitates in Ni–Ti–Al thin films

Multiple effects of Ni-rich precipitates in Ni–Ti–Al thin films

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

Effect of Nano-Y2O3 Content on Microstructure and Mechanical Properties of Fe18Cr Films Fabricated by RF Magnetron Sputtering

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