Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining
Jinjin Han,
Linpeng Tong,
Bin He
et al.
Abstract:The difficult-to-cut characteristics of silicon carbide (SiC) ceramic has limited its processing quality and forming process of functional surfaces. Comparing to direct laser machining (DLM), waterjet-assisted laser micromachining (WJALM) is an alternative technique for SiC ceramic that is capable of reducing thermal-induced damages. In this paper, high-aspect-ratio (HAR) microchannels are fabricated on silicon carbide ceramic by WJALM, and its effectiveness is verified through comparative experiments with DLM… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.